Chapter 8 - Operating Procedures
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MNL000536
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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8.
!!Operator Prompt!! –
Optional
A prompt will appear on the display “Gas Flow
Will Begin 10 Seconds After Pressing “OK”.
Acknowledge prompt by pressing the “OK” key.
Note: A purge/vent subroutine is run to purge
out the pigtail utilizing process gas.
During the cycle purge, the status is displayed in
the status box in the bottom left corner.
Note: During the cycle purge the status box
displays the following:
1)
The cycle purge being run.
2)
The process line number.
Source A = process line 1,
Source B = process line 2
3)
The number of times the cycle has been run,
compared to the number of times the cycle is
configured to be run.
(1) (2) (3)
9.
End of Condition.
NOTE:
There is no Dual Condition mode for systems with dual sources and the deep purge option.
Sources must be run through the Condition mode individually upon completion of the ‘DualPstPrg’
mode.
