Chapter 2 - Installation
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MNL000530
Revision 1
03/15/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
2
-
14
Bonnet Vent Line
The Bonnet Vent must be kept open to allow gas to escape. It must not be sealed or routed into other
vent lines. The bonnet vent discharge opening should be constructed to prevent blockage from
weather, animals, and insects, but not prevent gas from escaping.
If the standard outlet location is
directed in an unsafe manner (i.e. towards flammable construction materials, personnel walkways, etc.)
or presents another potentially unsafe situation the outlet must be rerouted to a safe location during
installation. Gas detectors and/or UV/IR detectors should be used in the surrounding area to monitor
for a potential leak.
Purge and High Pressure Leak Check (HPLT) Supply Line
The purge and HPLT supply line must be connected to a dedicated purge source, and leak check
source. The pressure required during cylinder purging is 80-90 psig (5.5-6.2 barg). An HPLT pressure
of 950-965 psig (65.5-66.5 barg) is required for silane (SiH
4
), nitrous oxide (N
2
O), nitrogen trifluoride
(NF
3
), hydrogen chloride (HCl), and carbon dioxide (CO
2
) process gases. For ammonia (NH
3
) process
gas, an HPLT pressure of 190-205 psig (13.1-14.1 barg) is required. Sufficient over pressure
protection must be provided. Versum Materials, Inc. recommends a safety relief valve set at a
maximum of 200 psig (13.8 barg) for the purge supply, and safety relief valve set at a maximum of
1200 psig (82.7 barg) for silane (SiH
4
), nitrous oxide (N
2
O), nitrogen trifluoride (NF
3
), hydrogen
chloride (HCl), and carbon dioxide (CO
2
) HPLT supply. For ammonia (NH
3
) process gas, a safety
relief valve set at a maximum of 250 psig (82.7 barg) is required. If a purge module has been
purchased from Versum Materials, Inc., relief devices will be included.
Purge and High Pressure Leak Check (HPLT) Backflow Prevention
All Purge and High Pressure Leak Check (HPLT) system must include backflow prevention in the
form of a check valve. This will prevent process gas from migrating back into the purge panels and
piping.
Enclosure Exhaust
Many BSGS eV / BULKGUARD eV modules are supplied with process piping inside an exhausted
enclosure. Modules that have been configured with a ventilation flow switch (a pitot tube will be
located inside the 6” vent stack), will require 200 CFM (5663 LPM) exhaust ventilation and -0.1” (-.25
mm) water column static pressure by the customer, whether located indoors or outdoors.
Purge gas sources used for the BSGS eV / Bulkguard eV must
not be shared with other BSGS eV / Bulkguard eV modules if
the gas types are incompatible. Purge gas must not be supplied
from a low pressure bulk gas source.
