Appendix E - Startup and Commissioning Checklist
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MNL000542
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page APP
E
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7. Alarm Matrix / Shutdown Function Tests for Analog Inputs
Initials
or N/A
Date
A.
Verify the User setpoints in the AP controller match those shown on the Alarm Matrix.
B.
Verify the VERSUM MATERIALS, INC. setpoints in the AP controller match those shown on the
Alarm Matrix.
C.
Verify the Purge Parameters and Leak Check setpoints in the AP controller match those shown on
the Alarm Matrix.
D.
Verify the Alarm Responses, Alarm Conditions, and Alarm Delays in the AP controller match those
shown on the Alarm Matrix.
E.
Using the Alarm Matrix and Purge Gas, verify each pressure alarm listed on the Alarm Matrix -
Low-Low level Shutdowns, Low level Faults, High level Faults, and High-High level Shutdowns.
As each Fault Alarm or Shutdown Alarm is activated on the AP controller, verify the Relay Outputs
are properly causing the appropriate response. Each response must be tested. Verify the Outputs to
the Customer.
F.
Verify that each program sequence runs properly for each BSGeV Module. Start Online
_____
Start Pre-Purge
____
Start Cyl. Change
____
Start Post Purge
____
Start Conditioning
____
8. Tube Switching (Optional)
Initials
or N/A
Date
A.
Perform point-to-point checks on all pneumatic tubing/lines. Using the AP11 controller, manually
exercise each Valve and verify that each pneumatic line opens the proper valve. Verify operation of
each valve by listening for valve venting and verify graphic change on the AP controller screen.
B.
Verify Tube Switching software. Run Tube Switching program sequences/combinations.
NOTE: Depending on the number of tubes, some sequences/combinations will not be available.
(initial each sequence mode as it is completed):
Start T SW 2x2
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Start T SW All
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