Chapter 1 - Safety Warnings
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MNL000127
Revision 8
07/27/2016
Gas Equipment
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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1.10.2 Corrosive Gas Hazards
Corrosives such as chlorine, fluorine and
ammonia will irritate and burn human tissue.
They can cause personal INJURY and DEATH.
Exposure to very small concentrations of corrosive gases can cause severe irritation of the eyes and
respiratory system. At higher concentrations, they can cause
severe personal injury or death
.
Chapter 1 Section 9 of this manual lists the personal protective equipment required for use with
corrosive gases.
A list of most of the corrosive gases used in the GASGUARD® system follows:
Ammonia
Hydrogen chloride
Boron trichloride
Hydrogen fluoride
Boron trifluoride
Hydrogen sulfide
Chlorine
Nitrogen dioxide
Chlorine trifluoride Phosphorous pentafluoride
Dichlorosilane
Silicon tetrachloride
Fluorine
Silicon tetrafluoride
Hydrogen bromide
Tungsten hexafluoride
1.10.3 Flammable and Pyrophoric Gas Hazards
Flammable and pyrophoric gases could cause
fire, explosions, personal injury or death.
