Appendix E - Startup and Commissioning Checklist
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MNL000542
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page APP
E
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6. Alarm Matrix / Shutdown Function Tests for Analog Inputs
Initials
or N/A
Date
A.
Each device must be calibrated /verified for calibration using calibrated test equipment. Zero and Full Scale
must be checked. Once three (3) sets of zero and full scale have been completed with no adjustments to the
device, check one final time at 75%, 50%, and 25% of full scale (Ex. 0 - 3,000 pound scale must be
calibrated using 0 – 3,000 pounds of calibrated weight).
B.
Record device Make, Model, and Range for each unit being calibrated (Ex. MKS Pressure Transducer,
Model 870, Range: 0 – 250 PSIA).
Make, Model,
Range, Units
Initial
Zero
Calibrated
Zero
Span High
Range
Initial
Span
Calibrated
Span
BSGeV Source Pressure
1.
PT-1A1
2.
PT-1A2
3.
PT-1B1
4.
PT-1B2
BSGeV Interstage Pressure
1. PT-10A
2. PT-10B
BSGeV Regulated Pressure
1.
PT-2A
2.
PT-2B
Houseline Delivery Pressure
1.
PT-9
Delivery Purge and Vacuum
Pressure
1.
PT-4A
2.
PT-5A
3.
PT-5B
Exhaust Flow
1.
FT-1
Source Weight Scales
1. WT-1A1
2.
WT-1A2
3.
WT-1B1
4.
WT-1B2