GB 02905 - Edition 03 - April 12
1/1
E 11
Preliminary precautions
Users are advised to observe the precautions presented below during
any maintenance operation on the pump.
Remaining process gases in the pump may cause severe injury or death.
Before removing the pump, continue N
2
flow from the process tool for 30 min.
Nitrogen pressure and flow rate should be identical to be programmed
values during process.
During pump removal, operator could be in contact with process residues on
the exhaust which could cause severe injury or death.
Ask your safety department for instructions in accordance with the local
safety regulations.
Chemical supplies coming from the tool, as well as the water and the
nitrogen need also to be locked out/tagged out.
Users are advised:
Stop the pumping system according to «Shut down procedure for discontinuous
operation» safety instructions, see
C 00.
- Wear gloves, protective glasses and, if required for the used gases, a
breathing mask.
- Ventilate the premises well.
- Do not dispose of residue in the usual waste disposal network but, have it
destroyed by a qualified organization.
- Install the inlet and exhaust blanking plates, thus delivered with the pump.
adixen Vacuum Products - Operating instructions - A3P Series
