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GB 02899 - Edition 02 - November 07

3/3

D 10

First level of maintenance

Sensor connector lay-

out at the rear of the

monitoring system

Therm. Therm. N2

valve

Roots

ADP

LP Theregulungrm

ADP

Press

switch

Water

switch

Motor temp.

ADP switch

ADP

Temp.

Roots

Temp.

Heater

Temp.

Aux

Temp.

N2 LP

valve

Inlet

valve

Enclos.

switch

R.P. Heater

ADP

Motor temp

Roots sweraturitch

ANA.I.2

ANA.I.1

Check press

ANA.

Mass flow

Maintenance

operations

See section

adixen Vacuum Products - Operating instructions - A3P Series

Содержание A3P Series

Страница 1: ...Operating instructions Operating instructions Translated from original version Translated from original version A3P SERIES Dry pumps for medium duty applications EN EN...

Страница 2: ...ecial feature Standby purge option Standby power high speed option Semi S2 0706 standard compatible option Dear Customer You have just purchased an Adixen dry pump We thank you and are proud to includ...

Страница 3: ...uding copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by from adixen Vacu...

Страница 4: ...32 or RS 485 link wiring B 120 Removable handle accessory installation Chapter C OPERATION C 00 Safety recommendations for harsh processes C 10 Operating modes C 20 Monitoring system parameters C 25 S...

Страница 5: ...rical schematic G 170 Electronic cabinet G 200 Service Indicates a potentially hazardous situation which if not avoided could result in moderate or minor injury It may also be used to alert against un...

Страница 6: ...uction Operating Manual A3P Series Detailed contents A A 10 Operating principle A 20 Description A 30 Monitoring system A 40 Technical characteristics A 50 Accessories A 60 Options adixen Vacuum Produ...

Страница 7: ...ype pumping stages The two rotors rotate without touching each other XHAUST STAGE 4RANSFER STAGE 4RANSFER STAGE 4RANSFER STAGE XHAUST 4RANSFER STAGE NLET STAGE NLET Tightness with environment The pump...

Страница 8: ...g leaks outside the pump and requires no maintenance Tightness at shutdown The pump is fitted with an antisuckback valve in the pump exhaust pipe preventing the exhaust being sucked back The pump in a...

Страница 9: ...to the front or rear panel to display and program the pump parameters A remote control connector dry contacts 50 pins plug located on the electrical interface panel allows pump control and communicati...

Страница 10: ...IES PANEL LECTRICAL INTERFACE 2EAR PANEL 2EMOTE CONTROL CONNECTOR 5SER CONNECTOR NLET PORT SOLATING VALVE CONNECTOR AIN POWER IF HARDWIRE XHAUST PORT 7ATER 54 NCLOSURE EXHAUST PORT 7ATER CONNECTOR 23...

Страница 11: ...Water flow switch warning 2 Water solenoid valve 3 Pump temperature sensor warning and hazard 4 Motor temperature switch warning and hazard IS Inlet stage TS Transfer stage ES Exhaust stage A603P A100...

Страница 12: ...UNCTIONAL BLOCK NERTS GAS OTOR 6 Pressure regulator 7 N2 flow switch hazard Semi configuration 8 N2 valve 9 Flow sensor warning and hazard 10 Inert gas purge nozzles 11 Pressure sensor warning and ha...

Страница 13: ...he electronic cabinet is located at the top of the machine It ensures the pump automatic operation and controls all sensors It is linked to the light indicators It allows to exchange data with the han...

Страница 14: ...last ten warnings and hazards RS 232 485 Network links Note the monitoring system can be interfaced with the process tool via the remote control connector or RS 232 485 connectors Main functions Pump...

Страница 15: ...2 10 3 1 10 3 1 5 7 5 10 1 1 10 3 1 10 3 7 5 10 1 7 5 10 1 Max continuous inlet flow slm 50 25 Supply voltage 1 4 Low voltage High voltage V 200 230V 3 phases 50 60Hz 380 440V 3 phases 50 60Hz Power...

Страница 16: ...er from the pump 3 Oil charge is filled at factory Do not modify the oil level A 113 Material safety data sheet is available on request 4 For Semi hardwire option the Short Circuit Current Rate SCCR o...

Страница 17: ...GB 02868 Edition 06 Oct 13 3 6 A 40 Technical characteristics Dimensions and interfacing A103P pump RONT VIEW EFT VIEW 2IGHT VIEW OTTOM VIEW adixen Vacuum Products Operating instructions A3P Series...

Страница 18: ...A 40 GB 02868 Edition 06 Oct 13 Technical characteristics Dimensions and interfacing A603P A1003P pumps RONT VIEW EFT VIEW 2IGHT VIEW OTTOM VIEW adixen Vacuum Products Operating instructions A3P Seri...

Страница 19: ...hnical characteristics Seismic tie down dimensions RONT VIEW OTTOM VIEW A103P A603P A1003P A mm 325 683 inch 12 79 26 89 B mm 233 5 233 5 inch 9 19 9 19 C mm 385 385 inch 15 16 15 16 adixen Vacuum Pro...

Страница 20: ...oot Foot Foot Foot A103P A603P A1003P mm inch mm inch Gravity center X 145 5 71 153 6 02 Y 345 13 58 361 14 21 Z 153 6 02 312 12 28 Kg lbs Kg lbs Weight 125 275 6 270 595 2 Gravity center 1 47 103 6 8...

Страница 21: ...ating parameters to access and modify configured parameters and to start and stop the pump Description P N Qty Hand held display module kit including 112631S 1 Hand held display module 1 Cable 1 5 m 1...

Страница 22: ...ter connectors These connectors allow to connect the pump to the customer water circuit Description P N Qty IN 1 4 quick female connector 076721 1 OUT 1 4 quick male connector 076720 1 Connection to t...

Страница 23: ...9 Flow sensor warning and hazard 10 Inert gas purge nozzles 11 Pressure sensor warning and hazard 13 N2 valve IS Inlet stage TS Transfer stage ES Exhaust stage HPS High Pressure stage Electrical conn...

Страница 24: ...B 40 Inert gas purge connection N2 connection B 50 Electrical connection B 51 Checking the direction of rotation at initial pump start up for A603P pump only B 60 Connection to the pumping circuit B...

Страница 25: ...ead to non compliance with the regulations or even to put into doubt the EMC ElectroMagnetic Compatibility performance and the safety of the product Manufacturer declines any responsibility for such o...

Страница 26: ...tag out LO TO device In order to properly secure the pump for installation and or maintenance it is required to lock out tag out the pump properly in accordance with OSHA requirement 29 CFR 1910 147 A...

Страница 27: ...ate temperatures justifying particular attention on the part of the user external surfaces 70 C on exhaust connections Contact may cause burns Wait 30 min before servicing and always use gloves The pr...

Страница 28: ...switch power off and on to clear the fault Manufacturer has no control over the types of gases passing through this pump Frequently process gases are toxic flammable corrosive explosive or otherwise r...

Страница 29: ...instruction Located on the upper cover this label indicates that some of the internal parts are energized and could cause electrical shocks in case of contact It advises to disconnect the pump before...

Страница 30: ...adresses at the back of the operating instructions Decontamination product dismantling According to the regulations 2002 96 CE about Waste of electrical and electronical equipments and 2011 65 CE abo...

Страница 31: ...uid capacity A103P Roots 100 cc 100 cc 700 cc Water cooling circuit B30 A103P A603P A1003P Water flow 100 l h Water temperature 10 to 25 C Pressure 300 700 kPa absolute 30 87 PSIG Connection inlet typ...

Страница 32: ...able section 6 A 6 A 10 A AWG 14 2 5 mm2 9 2 A 9 4 A 20 A AWG 10 4 mm2 12 A 12 A 20 A AWG 10 4 mm2 Pumping circuit B60 A103P A603P A1003P Gas inlet flange DN 50 ISO K DN 100 ISO K material remarks Sta...

Страница 33: ...h German Taiwanese Japanese and Korean language 1 EMO cover plug 1 remote control cover plug 1 maintenance cover plug 1 safety cover plug 1 power plug only for A3 P Range pump configurated with plug e...

Страница 34: ...is sealed with anti corrosion bag which should not be removed until the pump is ready to be used The inlet and exhaust are sealed with blank off flanges which should not be removed until the pump is r...

Страница 35: ...dling Storage Equipment storage If the pump is going to be put into storage the anti corrosion bag should not be removed This equipment can be stored at an ambient temperature between 10 C and 60 C ad...

Страница 36: ...mp fittings A3 P Range pumps are used in corrosive environments Their reliability will depend on proper installation and maintenance When assembling the vacuum circuit we recommend installing maintena...

Страница 37: ...74 PSIG 1400 kPa absolute 1 4 NPT 1 4 NPT 1 4 BSPP 1 4 BSPP ADAPTATOR NPT BSPP In order to limit corrosion and clogging of the pump cooling circuit it is recommended to use cooling water with the foll...

Страница 38: ...r panel N2 IN N2 pressure regulator Swagelok for tube 6 35 mm Stainless steel smooth pipe external diameter 6 35 mm Customer supply Manufacturer supply N2 flowrate adjustment Nitrogen needs to be used...

Страница 39: ...ctrical connection of the main power supply is provided by the user Customer electrical installation protection Main circuit breaker rating recommended values 200 230 V Low Voltage 380 440 V High Volt...

Страница 40: ...03P AWG 10 or 5 26 mm2 Then connect the power supply plug on the pump frame power supply connector and lock it W U V Earth 3 1 2 6 5 4 Not used Main cable Check that the cable is correctly protected a...

Страница 41: ...ided for this purpose Connect the mains cable to the main switch using a cable with following specification Cable customer supply A103P AWG 14 or 2 08 mm2 A603P A1003P AWG 10 or 5 26 mm2 To ground the...

Страница 42: ...it use a ring lug on the ground conductor green yellow and attach to the electrical frame pin with M4 nut Replace the left upper panel 2ING LUG AIN SWITCH ROUND WIRE Overcurrent protection required fo...

Страница 43: ...The display lights up and the following screens appear MAITING OLWRTA Initialize the system by pressing on ENTER Controlling the pump using the hand held display module 23 H LOC N2 LS RT PUMPING STOP...

Страница 44: ...electrical shock in case of contact Disconnect main electrical cable before any intervention Hazardous voltage enclosed Voltage or current hazard sufficient to cause shock Disconnect and lockout powe...

Страница 45: ...llation and start up procedure is complete and the direction of rotation is checked the pump is now ready for use B 60 However if the pump has to be remote controlled proceed to specific wiring instru...

Страница 46: ...a pump in operation For safety reasons any accessories connected to the inlet and exhaust must be made of materials compatible with pumped gases and leak tested after reassembly It is recommended to...

Страница 47: ...pressure sensor Remove the upper box from the pump by unscrewing the 4 screws Chc M4x12 Place the plate then the grey junck ring on the customer pipe Place the centering ring DN25 equipped with O ring...

Страница 48: ...nection A103P A603P A1003P Inlet connection DN50 ISO KF DN100 ISO K Several fitting accessories are available in the adixen catalog Incorporate flexible stainless steel flanged bellows in the vacuum p...

Страница 49: ...ontrol of pumping functions START STOP PURGE and Inlet valve Remote monitoring of pump status through auxiliary dry contacts 50 V DC 1A These contacts can be used to control automatic functions Monito...

Страница 50: ...ED SIDE VIEW Plug wiring 2EMOTE SELECT 3TART 0 2ANGE 3TART ROOTS 0 0 ONLY N FF PURGE 2EMOTE STANDBY PURGE NLET VALVE 0ERM AIR INLET VALVE N NOT USED UT WARNING EXHAUST PRESSURE UT WARNING PURGE UT WAR...

Страница 51: ...rolled by external contacts of the customer equipment 7IRING CUSTOMER SUPPLIED 3 3 3 3 6 6 3 3 3 0 0 ONLY Contact Function All dry contacts are normally open S1 18 19 local mode or remote control mode...

Страница 52: ...stand by purge stops This function is only valid when remote control mode is validated with contact S1 open and when N2 STANDBY selection is validated in DEFINITION menu of hand held display module S6...

Страница 53: ...ning A603P A1003P only 8 9 Out final valve 14 15 Pump running 16 17 Inlet valve 35 36 Out warning motor temp 37 38 Out warning purge 39 40 Out warning exhaust pressure 41 42 Local or remote Contact cl...

Страница 54: ...emale plug 14 pins 1 2 3 4 5 6 7 8 9 10 11 12 13 14 24VDC N2 switch open if N2 flow 14 slm N2 switch open if N2 flow 14 slm Enclosure switch open in case of secondary exhaust failure Enclosure switch...

Страница 55: ...ng for standby power option 6IEWED UNDER CONNECTION SIDE ONNECTOR TYPE PINS FEMALE 3UB 2EAR SIDE 0 0 0 PUMPS 5SER CONNECTOR 4 1 9 2 10 3 11 12 5 15 13 6 7 8 14 0V Pump connection 4 1 9 2 10 3 11 12 5...

Страница 56: ...wirings allow the High speed option operation when the monitoring setting is ENABLED C 10 4 1 9 2 10 3 11 12 5 15 13 6 7 8 14 0V Pump connection 4 1 9 2 10 3 11 12 5 15 13 6 7 8 14 User plug 0 10V Wir...

Страница 57: ...A1003P Pumps EMO connector Plug wiring All dry contacts are rated 50V 1A 7IRING VIEWED UNDER SOLDERED SIDE Study the preliminary precautions B 00 In local mode the pump can run only if the cover plug...

Страница 58: ...rial link connected with manufacturer network The commands and message reception syntax is available on section C 90 RS 232 485 connector location Rear side A103P A603P A1003P pump RS 232 485 connecto...

Страница 59: ...nk RS 485 Series type connection All communications will be lost if any one pump is disconnected RS 485 communication box 9 pin female DB RS 485 9 pin male DB RS 232 485 9 8 8 9 9 8 8 9 9 8 6 7 8 9 1...

Страница 60: ...hree Chc M4 screws equipped with their washer Put in place the handle Move the pump with the removable handle Install the removable handle on its support Remove the removable handle from the right upp...

Страница 61: ...C 40 Operating mode with hand held display module accessory C 41 Start up of the monitoring system C 42 Monitoring system function table C 43 Starting mode definition Hand held display module C 44 Sa...

Страница 62: ...ld up and corrosion inside the pump From the process chamber flush the pump using a dry insert gas such as Nitrogen through the inlet port during 30 minutes Stop inert gas supply and let the pump runn...

Страница 63: ...violent air inrush Explosion consequences An explosion either in vacuum line or pump or exhaust line is a complex chemical reaction An explosion can also generate a leak which will generate a second...

Страница 64: ...erential pressure is too high meaning that only a soft pumping valve can be used to evacuate the chamber from atmosphere To use an efficient flow restriction i e soft pumping for chamber evacuating fr...

Страница 65: ...ial equipment The pump is remote controlled by the opening or closing of different dry contacts wired on remote control connector B 70 This mode is enabled when S1 contact is open that also inhibit th...

Страница 66: ...mmand C 90 N2 control operation Software monitoring The absence or a too low flow of N2 is software monitored This is defined by two parameters that can be adjusted through the HHDM C 42 N2 flow senso...

Страница 67: ...layed on the HHDM The pump buzzer will turn on The pump alarm signal remote control plug pins 4 and 5 the N2 flow feedback signal remote control plug pins 37 and 38 and the final valve interlock signa...

Страница 68: ...by a power failure Auto start setting The selection of the Auto start can be performed by the RS 232 485 or the HHDM accessory To change the parameter of the Auto start from Disabled to Enabled with...

Страница 69: ...lows High speed option setting The High speed option parameter in the DEFINITION menu C 42 is set at factory as follows A103P A603P A1003P High speed option Enabled Disabled To change the parameter of...

Страница 70: ...tion time The pump is stopped immediately when the hazard occurs Warning water flow switch Indicates a water flow below 60 l h Warning motor temperature switch A motor temperature warning is generated...

Страница 71: ...st switch Semi configuration Ground fault relay Semi configuration Function Detect a defect of N2 flow purge Detect an overpressure in the exhaust line Detect a motor ove rheating Detect a defect of e...

Страница 72: ...cessory C 41 Start up of the monitoring system C 42 Monitoring system function table C 43 Starting mode definition Hand held display module C 44 Saving and loading of pump configuration C 45 Monitorin...

Страница 73: ...setting mode Press to exit the various menus without validating the functions Selection keys Press to move to the next or the previous menu the next or the previous parameter in the displayed menu Pre...

Страница 74: ...ights up and the following screens appear Initialize the system by pressing on ENTER The monitoring displays the status of the pump Because it is the first connection it is necessary to take the pump...

Страница 75: ...e through to DATE TIME menu Validate with the ENTER key Access to the selected parameters with key or Validate with the ENTER key Update the needed parameters and validate Return to the main menu by p...

Страница 76: ...code which disables parameter modifications Press the SET key When the code is displayed 0 set at factory press the ENTER key The access code can be customized see Password parameter of the Managemen...

Страница 77: ...mote controlled Disabled STANDBY N2 OPTION ENABLED DISABLED Authorizes the stoppage of the nitrogen injection in the functional block stages when processing is stopped if standby purge option installe...

Страница 78: ...iguration SERIAL LINK 1 TYPE RS 232 RS 485 Network RS 232 ECHO ENABLED DISABLED Enabled SPEED 9600 bauds 9600 bauds PARITY no even odd No 2 STOP BITS ENABLED DISABLED Disabled ADDRESS 0 to 999 0 N2 FL...

Страница 79: ...000 h 17000 EXHAUST WARNING 1000 to 42000 h 8500 4 2 4 2 MAINTENANCE 3 4 Selection Selection Setting limits Initial configuration POWER SENSOR WARNING THRESHOLD 500 to Alarm threshold 2800 ALARM THRES...

Страница 80: ...ERSION FLASH DISP VERSION STORAGE ENABLED DISABLED Disabled CONFIG SAVE Save the pump configuration into the remote display memory Valid by pressing Enter Key CONFIG LOAD Allow to transfer the remote...

Страница 81: ...n Displays the operating times of the various components 4 2 OPERATING TIME 3 4 Definition Displays the 10 last recorded warnings 4 2 LAST WARNING S 3 4 Definition Displays the 10 last recorded alarms...

Страница 82: ...ssure regulator as required by customer application B 40 23 H LOC N2 LS RT ADP POWER 1000 W PRESSURE 1322 HPA ADP TEMP 82 C Note Only installed and configured parameters are displayed During pump star...

Страница 83: ...s during the shutdown phase if timing of N2 flow prolonged of the SETTING menu has been programmed 0 to 120 min C 42 This additional N2 injection is activated after each pump stop whatever may be the...

Страница 84: ...le from the other hand held display modules as long as the first one has not given the control back To give the control again press on the CONTROL key of the hand held display module until the star ha...

Страница 85: ...idate with the ENTER key Press the key repeatedly to access the CONFIG SAVE menu Validate with the ENTER key The following screen appears Validate with the ENTER key The pump configuration is then tra...

Страница 86: ...display module into the pump by selecting the CONFIG LOAD menu from MANAGEMENT menu The former configuration is automatically reset All pump parameters are loaded remotely except the following parame...

Страница 87: ...repeatedly to access the STORAGE menu Validate with the ENTER key Choose the parameter ENABLED with the or keys The pump start up is no longer possible and the hour counter is stopped Note When power...

Страница 88: ...alve is always open Inlet valve option on Enabled The valve can operate in four different ways Controlled by the pump local mode Controlled by the hand held display module Controlled by the customer s...

Страница 89: ...n the pump is started the valve opens 3 seconds after the pump starts Controlled by the customer s equipment remote control mode For the valve operating mode as described below contact S1 must be open...

Страница 90: ...ameter with or keys Validate with the ENTER key Return to main menu with SET key Access in the SETTING menu Monitoring system parameter configuring The initial configuration of the serial link is as f...

Страница 91: ...unit varies from 000 to 999 ORDer sent Associated PARameter see list see list Heading character Message and character ASCII code 13 The character LF is not taken account by the unit R e s p o n s e Th...

Страница 92: ...nitrogen flow 04 reserved 05 reserved 06 purge flow prolonged 07 full overhaul 08 P out maintenance 09 reserved 10 exhaust Maintenance 11 reserved 12 reserved 13 pressure alert threshold 14 date setti...

Страница 93: ...ntrol mode bit 0 0 stand by purge Off bit 0 1 stand by purge On bit 1 0 stand by power Off bit 1 1 stand by power On 9 water valve 10 inlet valve 11 reserved 12 pump water valve 13 reserved 14 reserve...

Страница 94: ...000STA CR Response 000 00000 2 0080 2530 0127 1230 0000000000 CR Only commands requiring the separator character are affected by the SEP command Modifying the header character Order Paramater Respons...

Страница 95: ...or a specific response to the order if everything is correct ERR0 setting fault ERR1 order fault ERR2 parameter fault ERR3 context fault ERR4 checksum fault Note The RS 232 or RS 485 commands have pr...

Страница 96: ...erating Manual A3P Series Detailed contents D D 00 Safety instruction related to maintenance D 10 First level of maintenance D 20 Fault message number table D 30 Diagnosis and trouble shooting adixen...

Страница 97: ...urfaces It states that protective gloves should be used before performing any intervention The protective gloves should be used in accordance to the protective gloves supplier s instruction Located on...

Страница 98: ...ntacts on the remote control connector at the rear side of the pump are open A message via the RS 232 serial link If the pump is equipped with hand held display module accessory One or several faults...

Страница 99: ...he rear side of the electronic cabinet Rear side of the electronic Safety connector cabinet on A103P model Female plug 14 pins Connect the maintenance cover plug instead of the cover plug on the safet...

Страница 100: ...Roots ADP LP Theregulungrm ADP Press switch N2 switch Water switch Motor temp ADP switch ADP Temp Roots Temp Heater Temp Aux Temp N2 LP valve Inlet valve Enclos switch R P Heater ADP Motor temp Roots...

Страница 101: ...MP D40 SAFETY ROO TEMP W29 MAINT ROOTS W30 EXHAUST MAINT W31 ADP LP MAINT W32 ADP MAINT D34 EM STOP ADP CONT D35 EMERGENCY STOP D36 ADP CONTACTOR D37 ROOTS CONTACTOR D39 ROOTS BREAKER D44 SAF CABINET...

Страница 102: ...ith several hand held module display Only one hand held module display can monitor the pump Press on CONTROL to disable the monitoring on other module displays Press on CONTROL on the requested module...

Страница 103: ...RESSURE Pump does not start Exhaust pressure 1400 hPa Check the exhaust pipe Other problem Call the customer service center Pump is running Exhaust pressure 1990 hPa Check the N2 flowrate setting valu...

Страница 104: ...Safety hazard D10 MOTOR TEMP or Safety hazard D41 SAFETY MOTOR TEMP D41 defect appears only if the Sa fety plug is connected to the safety connector B 80 Motor temperature is 150 C Refer to water flo...

Страница 105: ...rge flow Check the nitrogen supply Check the main valve connection on N2 valve connector D 10 Insufficent purge flow 14 slm Check the N2 flowrate setting value B 40 Check that there are no leaks Senso...

Страница 106: ...e customer service center Warning W16 INTERNAL T LOW Pump temperature is of 10 C to the temperature control setting value Temperature control valve supply problem Check the temperature control valve c...

Страница 107: ...e Motor temp Roots switch connector D 10 Other problem Call the customer service center Warning W29 MAINT ROOTS Warning W30 EXHAUST MAINT Warning W31 ADP LP MAINT Warning W32 ADP MAINT The maintenance...

Страница 108: ...trap between pins 2 and 3 of EMO B 100 Other problem Call the customer service center Hazard D37 ROOTS BREAKER Incorrect monitoring configuration for A103P Check that SYSTEM SELECT on DEFINITION MENU...

Страница 109: ...tability in the Exhaust box Check the customer exhaustability line Exhaustability threshold 1 6 hPa Check the customer exhaustability line Sensor problem Check the exhaustability connection on the Enc...

Страница 110: ...iled contents E E 10 Standard repair exchange E 11 Preliminary precautions E 12 Draining of the water cooling circuit E 14 Disconnecting the pump from the installation E 15 Shipping procedure E 20 Inc...

Страница 111: ...g installation E 15 Shipping procedure G 200 Safety questionnaire B 10 to B 60 Installing a new pump Standard repair exchange procedures A3 P Range standard repair exchange has been detailed into seve...

Страница 112: ...e injury or death Ask your safety department for instructions in accordance with the local safety regulations Chemical supplies coming from the tool as well as the water and the nitrogen need also to...

Страница 113: ...f IN and connect the other end to a compressed air circuit 200 to 500 kPa Connect pipe B on the pump at location OUT and place the other end of the pipe in a vessel total water volume will be less tha...

Страница 114: ...Disconnect the water inlet and outlet quick connectors Disconnect the N2 purge connector Disconnect the pump from the inlet piping Cap the equipment inlet piping Disconnect the secondary exhaust port...

Страница 115: ...pment Draining of the water cooling circuit E 12 Seal the inlet and exhaust Pump must be sealed hermeticaly to avoid leak of by products and residual gases Blank off flange kit F 10 Blank the inlet Pl...

Страница 116: ...34000 H The fresh screen appears Use the keys to increase the maintenance duration time Validate with the ENTER key Return to the main menu and exit the setting mode using the SET key When the mainten...

Страница 117: ...Edition 02 June 08 1 1 Maintenance components Operating Manual A3P Series Detailed contents F F 00 Spare parts Instruction of use F 10 Spare part list adixen Vacuum Products Operating instructions A3...

Страница 118: ...genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides cou...

Страница 119: ...0 1 1 F 10 Spare part list A103P P N A603P A1003P P N Blank off flange kit 112311 112313 Emergency plug connector 106587 106587 Remote control plug connector 107222 107222 adixen Vacuum Products Opera...

Страница 120: ...Detailed contents G G 100 Declaration of conformity G 101 Semi certificate G 110 A103 Electrical schematic G 120 A603 Electrical schematic G 130 A1003 Electrical schematic G 170 Electronic cabinet G 2...

Страница 121: ...GB 02861 Edition 03 April 12 1 1 G 100 adixen Vacuum Products Operating instructions A3P Series...

Страница 122: ...GB 03726 Edition 01 November 07 1 1 G 101 Semi certificate adixen Vacuum Products Operating instructions A3P Series...

Страница 123: ...GB 03721 Edition 01 November 07 1 1 G 110 A103 Electrical schematic 3EMI PTION 3EMI PTION 2 adixen Vacuum Products Operating instructions A3P Series...

Страница 124: ...GB 03722 Edition 01 November 07 1 1 G 120 A603 Electrical schematic 3EMI PTION 3EMI PTION adixen Vacuum Products Operating instructions A3P Series...

Страница 125: ...GB 03723 Edition 01 November 07 1 1 G 130 A1003 Electrical schematic 3EMI PTION 3EMI PTION adixen Vacuum Products Operating instructions A3P Series...

Страница 126: ...ion 01 November 07 1 1 G 170 Electronic cabinet Valve and sensor electrical diagram Not used NU Not used NU NU NU UN UN UN ybdnatS rewoP NU Not used NU d NU adixen Vacuum Products Operating instructio...

Страница 127: ...e accepted if they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substan ces and compounds in accordance with the hazardous goods regulations curr...

Страница 128: ...ow and our portfolio of training opportunities We support you with your plant layout and provide opportunities We support you with your plant layout and provide first class on site service worldwide f...

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