6 - 17
LLE11ARDA001A/E
5$
5$
5$
5$
6.16 Replacing the Carriage AS
Replacement part: 40350-5000
1. Remove the lower processing chamber AS
(40350-9100).
(See 6.15.)
2. Disconnect all the connectors from the
carriage AS (40350-5000)
3. Unscrew the fixing screws SB6×12 (n=2) of
the X axis motor.
4. Unscrew SB6×12 (n=4) and remove the shaft
holders (40350-M102, n=4). Remove the
carriage AS (40350-5000).
* Pay attention to ensure against bending the
shading plate for the X axis origin sensor.
5. Reassemble the parts in reverse order.
6.17 Replacing the Y Axis AS
Replacement part: 40350-5300
1. Remove the front cover (40350-M220) and
side cover (40350-M223).
(See the section 5.)
2. Remove the pin (40350-M570) and move the
pipe to the processing chamber side.
3. Disconnect the CN2 connector of the pulse
motor driver (for Y axis) (40350-E030).
4. Unscrew SB4×12 (n=4) and SB6×15 (n=2).
Remove the Y axis AS (40350-5300).
5. Reassemble the parts in reverse order.
6. Check the operation of the Y axis carriage
AS. Verify that the lowering and returning
amounts from the upper and lower limits are
10mm or more. When they are less than
10mm, adjust the fixing position of SB4×12
(n=4).
* Pay attention to ensure against dropping a ball
from the feed screw.
5$
5$
Содержание ME-1000
Страница 8: ...1 2 LLE11ARDA001A E...
Страница 12: ...3 2 LLE11ARDA001A E...
Страница 120: ...7 34 LLE11ARDA001A E...
Страница 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Страница 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Страница 123: ...8 3 LLE11ARDA001A E...
Страница 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Страница 126: ...8 6 LLE11ARDA001A E Rear view or...