6 - 15
LLE11ARDA001A/E
6.14 Replacing the Upper Processing Chamber AS
Replacement part: 40350-9200
1. Remove the front cover.
(See the section 5.)
2. Remove the electric operated cover AS (40350-
7000).
(See 6.1.8.)
3. Remove the right and left lens measuring AS
(40350-4100, 4200).
(See 6.9.)
4. Remove the SFB AS (40350-6000). (See 6.12.)
5. Remove the ganged water supply AS (40350-
9300).
(See 6.13.)
6. Unscrew the set screws HH4×4 (n=2) of the
column (40350-M921) and remove the block
(40350-M966). Remove the upper processing
chamber AS (40350-9200) together with the
block (403500-M965) and guide (40350-
M941).
7. Reassemble the parts in reverse order.
**
Содержание ME-1000
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