6 - 26
LLE11ARDA001A/E
5$
'
5$
'
6.23.3 Replacing the Alfa step motor driver for the
θθθθθ
axis
Replacement part: 40347-E031
1. Remove the power AS (40350-1500).
(See 6.33.)
2. Disconnect all the connectors from the Alfa
step motor driver (for
θθθθθ
axis, 40347-E03).
3. Unscrew SB3×8 (n=2) and remove the Alfa
step motor driver (40347-E031).
4. Reassemble the parts in reverse order.
6.23.4 Replacing the Alfa step motor driver for CHUCK
Replacement part: 40273-E007
1. Remove the power AS (40350-1500).
(See 6.33.)
2. Unscrew SB3×8 (n=2) and remove the Alfa
step motor driver (for CHUCK, 40273-
E007).
3. Unscrew SB3×8 (n=2) and remove the Alfa
step motor driver (40273-E007).
4. Reassemble the parts in reverse order.
Содержание ME-1000
Страница 8: ...1 2 LLE11ARDA001A E...
Страница 12: ...3 2 LLE11ARDA001A E...
Страница 120: ...7 34 LLE11ARDA001A E...
Страница 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Страница 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Страница 123: ...8 3 LLE11ARDA001A E...
Страница 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Страница 126: ...8 6 LLE11ARDA001A E Rear view or...