MKS GMW-25, Руководство по эксплуатации

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System Installation
GMW-25 2-11
2.4.3 9-pin PL-2HF Analog I/O Interface (ENI P/N: 1050-290)
The 9-pin PL-2HF Analog I/O Interface is available to provide a proper
interface to a system previously connected to ENI’s PL-2HF Plasmaloc
Generator.
Pin Function Type Description
1 FAULT DO Provides contact between Pins 1 and 8.
Contacts will close if a fault is detected.
If fault is detected, Pins 1 and 8 will be
shorted. No fault is open between Pins 1 and
8.
Fault Conditions: 1 if AC Power is Lost
2 if RF is OFF
3 if Overheat Condition
2 LOAD POWER
READ BACK
AI Output, load power output, cal at 1.00 volt per
kilowatt.
3 FORWARD
POWER
READBACK
AO Output, forward power output cal at 1.00 volts
per kilowatt.
4 GROUND
5 GROUND
6 +10 VDC AO Used for Set Point Generation in conjunction
with potentiometer.
7 POWER
SETPOINT
AI Input, RF power set point, 0 - 10 VDC,
8.57 V=1200 W, 10.00 V=1200 W, for
example.
8 FAULT
RETURN
See Pin 9.
9 RF ON
REMOTE
ENABLE
DI Digital Input, ground reference logic input,
LOW-selects analog remote and turns on RF
power.
HIGH-disables analog remote; leaving pin
disconnected will ensure a HIGH state
9-pin PL-2HF Analog I/O Interface
Table 2.4.3
DI = Digital Input DO = Digital Output AI = Analog Input AO = Analog Output
Note: PL-2HF emulation requires the interface board to be configured for Load Leveling
mode only. This is now a jumper, J4, which will allow for forward-leveling mode upon
installation.