MKS GMW-25, Руководство по эксплуатации

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System Installation
GMW-25 2-29
2.8.3 Rear Panel
Connections
The following table briefly describes all of the rear panel connections
for the GMW-25 Generator.
Connector Description
Water In This connection provides for water to flow into the
generator for cooling purposes. It is designed for ¼”
male (NPT) pipe thread.
Water Out This connection provides for water to flow out of the
generator for cooling purposes. It is designed for ¼”
male (NPT) pipe thread.
RF Output Provides RF power to the plasma chamber. The
type of connector is specified at the time the unit is
ordered (see section 1.2).
Water Flow Readback This two-pin connection is provided to enable the
DSP controller to monitor the condition of water flow
into and out of the generator.
24 V Solenoid Supply This two-pin connection is provided for use with the
optional solenoid kit.
External Interlock
This two-pin safety interlock must be shorted to
allow the generator to operate. A plug is provided in
the accessories kit to allow the interlock to be
shorted. Removal of the plug disables the interlock.
Analog I/O Interface The analog interface uses a 25-way DB25F
connector. A safety interlock exists in Pins 10 and
23 (other interfaces are supported).
DC Bias Input This connector has an SMB-type jack for DC Bias
Leveling feedback.
AC Input This connection is used to provide the AC power to
the unit. The following AC Input Ratings apply:
3/PE ~ 200 - 208 V 15 A 50 - 60 Hz
Digital MW Fiber Optic These two connections are for two optional fiber
optic cables (one to send data and one to receive
data) to connect the generator to an optional remote
front panel.
Remote Front Panel This connection is a six-pin modular connector.
Serial Interface This interface is used to connect the generator to a
remote front panel. The standard is a Subminiature
Type D, 9-pin digital connection. Customized
interface cards can be installed.
External RF Input This connection is optional and is an SMB jack used
for an external RF source.