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Sales & Service Locations

ROCHESTER, NY

MKS Instruments, Inc.
100 Highpower Road
Rochester, NY 14623

Toll Free USA Sales Hotline:
Toll Free USA Service
Hotline:

Tel:

Fax:

(585) 427-8300
(585) 427-7839

1-800-267-5362

1-800-724-ENI1 (3641)

SAN JOSE, CA

MKS Instruments, Inc.
70 Rio Robles
San Jose, CA 95134

Tel:

Fax:

(408) 750-0300
(408) 428-0390

AUSTIN, TX

MKS Instruments, Inc.
1321 Rutherford Lane
Suite 200
Austin, TX 78753

Tel:

Fax:

(512) 719-8000
(512) 719-8095

ENGLAND

1 Anchorage Court
Caspian Road
Altrincham, Cheshire
WA14 5HH, England

Tel:

Fax:

44-161-929-5500
44-161-929-5511

GERMANY

Sielminger Str. 63
D-70771 Leinfelden-
Echterdingen (Stetten)
Stuttgart, Germany

Tel:

Fax:

49-711-947700
49-711-9477025

JAPAN

1-21-15 Aoyagi Kunitachi
Tokyo 186-0013
Japan

Tel:

Fax:

81-425-229-011
81-425-222-636

KOREA

Floor, DK Plaza-I

375-1, Geumgok-dong City
Bundangogu, Seongnam
Kyonggi-do, Korea 463-805

Tel:

Fax:

82-31-717-9244
82-31-717-9244

SINGAPORE

Blk 4010 Techplace 1
#01-07/08/09
Ang Mo Ko Ave 10
Singapore 569626

Tel:

Fax:

65-6451-1062
65-6451-0172

TAIWAN

2F, No. 47, Ln. 2, Sect. 2
Kuang Fu Rd.
Hsinchu 300
Taiwan, ROC

Tel:

Fax:

886-3-575-3040
886-3-575-3048

P.R. of CHINA

West end of 2

floor,

No. 3 building (T20-3)
No. 258 Jinzang Rd.,
Shanghai Jin Qiao Export
Processing Zone
Pudong, Shanghai 201206
P.R. of China

Tel:

Fax:

86-21-5834-7934 or
86-21-5834-7914
86-21-5834-7794

Product and Applications information also available on the Internet at:

http://www.mksinst.com

Содержание GMW-25

Страница 1: ...the product The use of CFC s for cleaning or maintenance may result in partial liquification of the no clean flux residue which will damage the unit and void the warranty ISO 9001 QUALITY SYSTEM This...

Страница 2: ...OM ANY CAUSE WHATSOEVER INCLUDING NEGLIGENCE Buyer s sole and exclusive remedy under this warranty shall be repair or replacement as set forth above or if MKS ENI Products is unable to repair or repla...

Страница 3: ...en Stetten Stuttgart Germany Tel Fax 49 711 947700 49 711 9477025 JAPAN 1 21 15 Aoyagi Kunitachi Tokyo 186 0013 Japan Tel Fax 81 425 229 011 81 425 222 636 KOREA 1ST Floor DK Plaza I 375 1 Geumgok don...

Страница 4: ...This page intentionally left blank...

Страница 5: ...4 Safety Labels 1 7 RF Radiation Warning Label 1 7 Heavy Object Warning Label 1 7 1 2 5 Technical Support 1 7 1 3 Name Plate 1 8 1 4 Generator Options at a glance 1 9 1 5 Getting Started Quickly 1 12...

Страница 6: ...MATCHWORK Power Requirements 2 18 2 6 2 AC Power Cable Connections 2 18 2 6 3 RF Power Connections 2 19 2 6 4 Fiber Optic Control and Debug Cables 2 19 2 7 Safety Interlocks 2 20 2 8 Panels and Contr...

Страница 7: ...4 Matching Network Operation through the Generator 3 10 Activating the front panel to display MW status Readbacks 3 10 3 1 5 Changing the Matching Network parameters 3 11 3 2 ENI Monitor Software Com...

Страница 8: ...Characters 3 26 3 4 7 Escape from Indefinite Loops 3 26 3 4 8 Link Release Character 3 27 3 4 9 XON and XOFF 3 27 3 4 10 Key Level 3 27 3 4 11 Link Integrity Checking 3 28 Chapter 4 Troubleshooting 4...

Страница 9: ...in 1 of set point over a Dynamic Power Range of 25 to 2500 watts Precise power calibration is traceable to NIST National Institute of Standards and Technology through the ENI Power Standard Low harmon...

Страница 10: ...tion and operating procedures in the Getting Started Quickly section detailed instructions are also available It is essential that you become thoroughly familiar with the contents of this manual prior...

Страница 11: ...rator It covers major features and front and rear panel descriptions Chapter 3 This chapter covers everything needed to install and set up your generator from Unpacking and Inspection to Initial Power...

Страница 12: ...s are shown for command parameters They are not part of the command and should not be entered Rounded Brackets These brackets contain hex equivalent numbers for printable or non printable characters T...

Страница 13: ...ution the reader that failure to follow important operating or maintenance instructions could adversely affect equipment reliability 1 2 2 Shock Hazard Warnings The warning label is used in this manua...

Страница 14: ...INSTALLATION ET D UTILISATION COUPER L ALIMENTATION AVANT TOUTE MAINTENANCE Service Warning Marking Figure 1 2 3 MKS ENI Products is responsible for safety reliability and performance of the equipmen...

Страница 15: ...e user that the unit weighs over 35 lbs 16 kg and should be moved by two people 1 2 5 Technical Support On the back of the generator is a label with an 800 number for MKS ENI Products Technical Suppor...

Страница 16: ...ifies the product configuration See section 1 4 for more information on the model number G CUST P N A number that is specific to the customer who ordered the unit and that contains the customer s own...

Страница 17: ...sy to tell what option has been installed on a specific unit The number generated from this matrix defines the configuration of that unit and results in a part number that will be utilized throughout...

Страница 18: ...Cooling Frequency AC Input Phase Front Panel Configuration Interface Card Configuration Output RF Connector Blank For ENI Internal Use Only G GENESIS Reserved for Future Use 12 1 25kW 70 7 0kW 25 2 5k...

Страница 19: ...e used to define the final configuration of a unit The unit you have received should have the value 25 in the fourth and fifth fields of the final part number Check the serial tag on the back of the g...

Страница 20: ...solenoid valve 2 Connect the water inlet and outlet hoses securely to the water inlet and outlet connections on the rear panel of the generator See section 2 10 for more information on the connectors...

Страница 21: ...Pin Outs The AC power contactor will not engage unless this interlock is defeated This interface will vary depending on what type of interface was selected when the unit was ordered If your unit does...

Страница 22: ...L REV FWD SET POINT STATUS AUX LEV MODE or 3W FP 3 1 46W 2000000 Hz REV FWD SET POINT STATUS AUX LEV MODE This display is only shown on auto tune generators 12 From the terminal you should see the fol...

Страница 23: ...t should this become necessary 2 1 3 Packaging for Reshipment Whenever possible the original shipping carton and packing material should be used for reshipment If the original packing material is not...

Страница 24: ...5 2 2 Installation Requirements 2 2 1 Dimension Requirements The following figure shows the dimension requirements for standard 19 inch rack mountings Front Side Dimension Requirements w Fully Functio...

Страница 25: ...ation is given below on installing the unit into the most common cabinet assembly 19 inch Cabinet The front panel can be ordered with a hole pattern for mounting in a 19 EIA rack However the generator...

Страница 26: ...The analog I O Interface for the GMW 25 generator provides Pin Name Type Description 1 Max Power E DO Emitter side of isolated transistor switch See Note 1 Transistor ON Indicates a max reverse power...

Страница 27: ...g remote enable DI Ground referenced logic input See Note 2 LOW Selects analog remote control mode HIGH Disables analog remote control mode Leaving this pin disconnected will ensure a configurable HIG...

Страница 28: ...O A linear DC voltage that represents the load power output level 0 V 0 W and the max value is adjustable between 0 and 12 VDC Typically calibrated to 10 VDC Maximum Rated Power 13 15 VDC User voltage...

Страница 29: ...voltage is configurable for 5 VDC or 15 VDC via a jumper on the control board Rated 10 mA max 25 Load power return AO Signal return for Pin 12 DI Digital Input DO Digital Output AI Analog Input AO Ana...

Страница 30: ...ated to 10 VDC Maximum Reflected Power Limit 3 FORWARD POWER AO A linear DC voltage that represents the forward power output level 0 V 0 W and the max value is adjustable between 0 and 12 VDC Typicall...

Страница 31: ...verheat condition or interlock broken 10 INTERLOCK This pin should connect to Pin 35 to complete the interlock chain If the interlock chain is broken the AC contactor will open External circuit should...

Страница 32: ...will open 36 ISOLATED 15 VDC Isolated 15 VDC supplied by customer system to maintain isolation 200mA max 37 ISOLATED 15 VDC Isolated 15 VDC supplied by customer system to maintain isolation 200 mA ma...

Страница 33: ...kilowatt 3 FORWARD POWER READBACK AO Output forward power output cal at 1 00 volts per kilowatt 4 GROUND 5 GROUND 6 10 VDC AO Used for Set Point Generation in conjunction with potentiometer 7 POWER SE...

Страница 34: ...Input Enables the RF output with a contact closure between Pins 4 and 9 5 Input RF Power Set Point 0 to 10 VDC 0 to maximum rated power linear 6 Analog signal common for Pins 5 3 and 2 7 Output RF ON...

Страница 35: ...4 5 DeviceNet Pin Out The device will use a 12 mm Micro connector or an equivalent for its DeviceNet interface The connector will have the following pin out 1 Drain bare 2 V red 3 V black 4 CAN_H whit...

Страница 36: ...in EMC compliance cables should be constructed using Alpha Supra Shield or equivalent cable and metallized backshells providing 360 shield termination There is a default communication jumper that is u...

Страница 37: ...nnector provides the electrical connection as defined in the table below Pin Function Description 1 TX RS 422 TX LO 2 TX RS232 RS 232 Tx data output 3 RX RS232 RS 232 Rx data input 4 RX RS 422 RX LO 5...

Страница 38: ...g to the n value which is a hex number from 0 FFH When the command is asserted the corresponding device at that address is the only device on the bus and all other devices tri state their transmitters...

Страница 39: ...an optional MW local control and a generator front panel MW control The interconnect consists of three types of cabling AC power RF power and control DSP based Matching Networks RF OUTPUT STUD TO LOAD...

Страница 40: ...hich has a voltage selector on the rear panel Each unit uses standard IEC connectors for power input AC Power Connection For Advanced MATCHWORK and RFC 6 Figure 2 6 1 The DSP based matching networks c...

Страница 41: ...onnection is made from the GMW 25 generator to the RF input connector on the tuner unit input panel An RG 393 U 50 ohm coaxial cable or equivalent should be used 2 6 4 Fiber Optic Control and Debug Ca...

Страница 42: ...and the circuit closure is via Pins 10 and 23 on the Analog Remote Interface All five interlocks must be engaged before power to the generator can be activated both the top cover and the RF cable cove...

Страница 43: ...System Installation GMW 25 2 21 Safety Interlock Locations Rear View Figure 2 7...

Страница 44: ...is section describes in detail all the front and rear panel controls and connections that are used on your generator Figure 2 8 shows the front panel for the generator with a fully functional front pa...

Страница 45: ...ently in use The possible choices for this field read FP for forward power and LP for load power The second line shows the set point in watts and the frequency presently selected by the generator The...

Страница 46: ...e front panel Three are positioned to the right of the digitizer knob AC ON RF ON and in the LOCK button and the other three are located in three of the buttons on the front panel Fault Reset Gen MW a...

Страница 47: ...the RF output from the generator Pressing the button will turn the RF ON LED to the right of the digitizer knob on and pressing it again will turn the RF ON LED off disabling RF output FAULT RESET Th...

Страница 48: ...any of the menus the digitizer knob can only be used to change the value of the set point from 0 W to 2500 W The faster the knob is turned the greater the jump in value selection the slower the knob...

Страница 49: ...Installation GMW 25 2 27 Fully Functional Front Panel The user can control and operate the GMW 25 generator directly if the unit has a fully functional front panel Fully Functional Front Panel Figure...

Страница 50: ...A remote front panel allows the user to place the generator in a rack system and control the generator remotely It has the same controls and operates in the same way as a generator with a fully funct...

Страница 51: ...ck must be shorted to allow the generator to operate A plug is provided in the accessories kit to allow the interlock to be shorted Removal of the plug disables the interlock Analog I O Interface The...

Страница 52: ...described in the table to the left In order to maintain EMC compliance wires to external interlock plugs Ext Interlock 24 V Solenoid Valve and Water Flow Readback must be wound 3 times through a suita...

Страница 53: ...nput Line Cord Assembly that comes equipped with a NEMA Type L15 30P plug The center pin of the AC Input Plug is connected to the generator chassis and serves as the Protective Earth Ground connection...

Страница 54: ...PT pipe thread If conditions exist where the water coolant temperature is below the ambient dew point temperature MKS ENI Products recommends that either 1 in line solenoid valves be installed on the...

Страница 55: ...ill tighten into the threads when you screw in the fittings Pointing the fitting towards yourself make the tape wrap in a clockwise CW direction Wrap tightly and make two 2 layers of tape around the f...

Страница 56: ...y a minimum of cleaning and maintenance Occasionally however it is recommended that the unit be wiped down on the outside with a damp cloth to remove any build up of dust and dirt To minimize the risk...

Страница 57: ...AC Power will not engage until this interlock is satisfied plugged See section 2 7 for more information about the safety interlocks 4 Assure that the AC line cord is plugged into 208 VAC 3 phase powe...

Страница 58: ...e I symbol on the circuit breaker handles should be visible The front panel display should appear as follows ENI Genesis Generator REV FWD SET POINT STATUS AUX LEV MODE After the contactor is engaged...

Страница 59: ...meters for variable and sensitive frequency processes 3 1 Basic Operation The GMW 25 generator is designed to be used with minimal input from the user 3 1 1 Generator Operation through the Front Panel...

Страница 60: ...LED must be off to use the front panel If not push the LOCK button to turn the LED off The LOCK button prevents all front panel controls except the Lock button itself from working This provides prote...

Страница 61: ...change from 0 9999W by using the digitizer knob If this is not a variable frequency unit NORMAL will be displayed in the STATUS field rather than a frequency Entering the frequency menu The first ste...

Страница 62: ...ield appears The frequency can now be adjusted using the Digitizer Knob If the configuration of the generator is fixed frequency you will not be able to change the frequency value If it is not then us...

Страница 63: ...ay in effect please wait The display will clear then display the following ENI MONITOR ON Ensuring that the ENI Monitor has control e 1 A prompt should appear after a carriage return is entered If the...

Страница 64: ...mple uses FP for the MODE The front panel will display the following assuming a set point of 1000 W and 200 W reflected is set 1000W FP 1000W 200W 1000W NORMAL STATUS SET POINT REV FWD AUX LEV MODE LL...

Страница 65: ...et to produce The value you entered should appear on the Front Panel display under the SET POINT field RSE e 2 Type the command RSE to return the set point to the ENI monitor The escape key can be use...

Страница 66: ...pt to communicate with the generator immediately even though there is no connection between the two and a flurry of information will appear across the screen disabling any further communications 3 A m...

Страница 67: ...7 For Matchwork Low Power Cal 8 For C1 and C2 Capacitor Position Cal 9 For Switch Selection E To View Calibration Settings F To Save Calibration Permanently Exit ENTER to EXIT now A flurry of informa...

Страница 68: ...MAN STATUS SETPOINT REV FWD MODE AUX LEV 0000 0000 0000 0000 000000 00 000000 STATUS SETPOINT REV FWD MODE AUX LEV C1 POS Tuning capacitor 1 position Displays 0 999 C2 POS Tuning capacitor 2 position...

Страница 69: ...1 or C2 Manually recall any previously saved presets Note Preset values cannot be created at this time Toggle between the three control modes MAN Manual AUTO and REM Remote mode View DC Bias or Vpp fi...

Страница 70: ...RS 232 or on a multi dropped RS 422 network RS 485 is not supported The ENI Monitor allows total access to all of the generator s features The commands available to the user using the ENI monitor for...

Страница 71: ...is the same as the address in an RS422 configured generator it is possible to communicate with the DSP If the ident does not match the address communication is disabled This command is designed to wor...

Страница 72: ...etc LIT This will disable link integrity checking The link integrity feature is turned on automatically when a w Control W is received over the serial link LLT n n 0 Forward power leveling is enabled...

Страница 73: ...PAV The result of this command is the display of the Voltage rail of the generator s PA When a dash is present in the command PAV this result will be updated continuously until the escape key is sent...

Страница 74: ...ion per line BIT STATUS DESCRIPTION 0 Analog Remote Mode 1 Load Power Leveling 2 System Fault 3 Interlock Open 4 Max Power Condition 5 RF On 6 Digital Remote Mode 7 External RF Used 8 Auto Fault Reset...

Страница 75: ...mm dd yy The real time date and time of the generator can be set by the following command TIM YYMMDD HHMMSS MON n The result of this command is the display of certain probes within the generator Avai...

Страница 76: ...f the capacitor This command can only be used in Manual Tune mode SCT 0 999 Sets the C2 tuning capacitor position The number following SCT represents a percentage 0 99 9 of the full range of the capac...

Страница 77: ...alibrated in Volts RMG Causes the magnitude error at the input of the MATCHWORK to be returned ROT Returns the amount of time that RF has been passed through the MATCHWORK If ROT is typed alone the va...

Страница 78: ...ator Front Panel Operation Before any of the various settings can be set make sure the system check has been performed in section 2 12 After that has been done the generator should be turned on follow...

Страница 79: ...e MENU button to access the Frequency Menu 2 Press the Item Up button to change the display to the next menu item The display should look like this FREQUENCY MENU Tune Mode Auto REV FWD SET POI NT STA...

Страница 80: ...ET POI NT STATUS AUX LEV MODE 2 Use the digitizer knob to select a minimum search threshold The range is from 0 0 W to 1 0 W Setting the delay time ITEM 1 Press the ITEM UP button to change the displa...

Страница 81: ...nob to select the optimal frequency Selecting the start frequency is not available with fixed frequency units Menu Navigation and Exit ITEM 1 Pressing the ITEM UP button will not return to the first m...

Страница 82: ...r returns a carriage return and a line feed 0x0A so that the terminal screen is correctly formatted In addition an asterisk is used to indicate that the command has been accepted and executed If an un...

Страница 83: ...generally have leading zeroes suppressed If a required user argument is omitted the generator will generally assume a value of zero for that argument 3 4 4 Special Characters Five characters have a s...

Страница 84: ...power up of the generator CR LF Power Up Delay Complete CR LF BEL The messages described in this section are the only cases where the generator sends unsolicited characters to the terminal 3 4 6 Backs...

Страница 85: ...GMW 25 Generator commands are at key level B These commands are for serious hardware and software debugging and for factory test or setup of the GMW 25 Generator Level B commands do not appear in the...

Страница 86: ...k integrity checking has been enabled by the host you may later disable it with the LIT command Check for proper link integrity control in the following manner 1 Turn the generators AC power ON via th...

Страница 87: ...ng This chapter lists solutions for the common problems a user may encounter when using the GMW 25 generator If the problem doesn t match any of those on the following pages please contact the nearest...

Страница 88: ...ocation for assistance Broken strap at LPF or VSWR bridge assembly Contact an authorized MKS ENI Products Service location for assistance Interlock string open Check cabinet and RF interlocks check th...

Страница 89: ...nel Use the RFV and the RPS command see section 3 2 3 on the ENI monitor to determine the fault Using the equal sign after the RFV command will show the fault in words instead of a numerical value Thi...

Страница 90: ...Hard Fault and the other appears on the display also known as a Soft Fault 4 3 1 RF OVERHEAT Hard Fault This fault occurs when the RF temperature is above the limit The RF OVERHEAT lamp will light up...

Страница 91: ...Appendix A GMW 25 A 1 Appendix A GMW 25 Specifications This appendix lists the complete physical and electrical characteristics for the GMW 25 Plasma Generator...

Страница 92: ...utput Distortion 40dBc within ratings Power Control Regulation AC Line to Power 0 5 max change in output power over rated line voltage range Regulation tolerance is referenced from Set Point Subject t...

Страница 93: ...allation Overvoltage Category INSTALLATION CATEGORY II Local level appliances portable equipment etc with smaller transient overvoltages than distribution level and fixed equipment Pollution Degree PO...

Страница 94: ...m x 483mm x 521mm including handles connectors Weight 55lbs 24 9kg Remote Interface Connector Standard Subminiature Type D 9 pin digital optional custom analog interface cards available RF Output Conn...

Страница 95: ...Symbols This appendix provides a definition of the symbols that have been used throughout this manual Caution Triangle Figure B 1 Shock Hazard Triangle Figure B 2 RF Radiation Warning Triangle Figure...

Страница 96: ...Appendix B B 2 GMW 25 This page intentionally left blank...

Страница 97: ...ables the generator to vary its operating frequency to achieve the lowest possible reflected power for a given load condition Minimum Search Threshold This software parameter refers to a pre defined v...

Страница 98: ...Appendix C C 2 GMW 25 This page intentionally left blank...

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