MKS GMW-25, Руководство по эксплуатации

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Operation
GMW-25 3-1
Chapter 3
GMW-25 Operation
Two modes of operation (basic and advanced) have been designed
into the GMW-25 generator to accommodate various plasma
applications. Some require just a fixed frequency and a set number of
watts, while others require fine-tuned frequencies and other
parameters.
•
Basic operation is intended for application of RF power and
a set number of watts to fixed frequency processes.
•
Advanced operation allows custom configuration of various
parameters for variable and sensitive frequency processes.
3.1 Basic Operation
The GMW-25 generator is designed to be used with minimal input from
the user.
3.1.1 Generator Operation through the Front Panel
Turning on AC Mains Power
Before operation of the front panel begins, make sure the system
check has been performed in section 2.12. After that has been done,
the generator should be turned on following the procedure below:
1. Flip the AC mains switch up to the ON position (The
I
symbol on
the circuit breaker handles should be visible). You should hear the
contactor engage. The front panel display should appear as
follows:
ENI
Genesis Generator
REV FWD
SET POINT STATUS
AUX LEV MODE