MKS GMW-25, Руководство по эксплуатации

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Operation
3-18 GMW-25
3.2.4 MATCHWORK
®
Control
The following commands allow the user to directly control the Matching
network using the ENI Monitor:
Command Options Description
AUT Forces the MATCHWORK into Auto Tune mode.
MAN Forces the MATCHWORK into Manual Tune mode.
RCL < 1-30 >
< A - F >
Causes one of 36 stored capacitor positions to be
recalled. This command can only be used in Manual
Tune mode.
SCO <0-999> Sets the C1 tuning capacitor position. The number
following SCO represents a percentage (0 - 99.9%) of
the full range of the capacitor. This command can only
be used in Manual Tune mode.
SCT <0-999> Sets the C2 tuning capacitor position. The number
following SCT represents a percentage (0 - 99.9%) of
the full range of the capacitor. This command can only
be used in Manual Tune mode.
SDT <0-999> Causes the MATCHWORK to delay before auto tuning
begins. The time is set in 100 ms steps allowing a
maximum time of 99.9 s before tuning begins.
STO < 1-30 >
< A - F >
Causes the current capacitor positions to be stored
into one of 36 preset locations. This command can
only be used in Manual Tune mode.
MATCHWORK Control Commands
Table 3.2.4
Note: The Matching Network needs to be connected to the generator per Figure 2.6 and set
up according to section 3.1.3.