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6.7.1. Heating the reservoirs
The reservoirs - except for the fluorine precursor (XeF2) - are heated in order to liberate the pro-
cess gases from the precursor substances and to improve their reactivity.
The fluorine precursor (XeF2) is never heated, but cooled, because this substance is volatile at
room temperature.
Procedure
1
Open the
Panel Configuration Bar
.
2
Double-click
Gas Injection System
.
The
Gas Injection System
panel opens.
3
Activate the
Reservoir
checkbox of the precursor you wish to work with.
The
Capillary
checkbox is activated automatically.
It is recommended that the heating remains switched on all the time to ensure stable conditions,
because it can last some time until the optimum working temperature is achieved.
The temperature should be adjusted in a way, that - when opening the respective reservoir valve
- the system vacuum is about 1 - 2 x 10
-5
mbar.
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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