![background image](http://html.mh-extra.com/html/zeiss/crossbeam-340/crossbeam-340_instruction-manual_927492041.webp)
PK=aÉëÅêáéíáçå
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
=QN=çÑ=NPQ
léíáçåë
3.4. Options
There is a variety of options available for example additional detectors, licenced software func-
tions, sample holders.
For details, contact your local Carl Zeiss service engineer or sales representative.
3.4.1. Applications
The basic workstation of Crossbeam 340 consists of a field emission scanning electron micro-
scope with GEMINI
®
column.
The following table shows applications and the required upgrade stages:
+
2
Five-channel GIS or Single GIS
+
3
Charge Compensator
+
4
Five-channel GIS with integrated charge compensation (CC)
Applications
Upgrades
FIB
GIS
Charge
compensation
(CC)
SEM operation
-
-
-
SEM operation, FIB imaging
Milling
+
-
-
SEM operation, FIB imaging
Milling
Gas assisted etching
Gas assisted deposition
Electron beam deposition
Electron beam etching
+
2
+
2
-
SEM operation, FIB imaging
Imaging of non-conductive speci-
mens
Milling
Gas assisted etching
Gas assisted deposition
Electron beam deposition
Electron beam etching
+
2 / 4
+
2 / 4
+
3 / 4
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Page 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Page 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Page 133: ......