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For more information about
In-lens Duo
detector or SESI detector refer to section 3.4.8.
For more information about aSTEM detector or the BSD4 detector refer to the corresponding in-
struction manual.
3.3.4.1. In-lens SE detector
The In-lens SE detector (
1
) is a high efficiency detector for high resolution SE imaging. It is located
above the objective lens (
3
) and detects directly in the beam path (
2
). The detection efficiency of
this detector results from its geometric position in the beam path and from the combination with
the electrostatic/electromagnetic lens.
SE2 detector
(Everhart-Thornley type)
Standard
SE2
Topography
VPSE detector
Standard
SE2
Topography in VP mode
Optional detectors
Configuration
Detected
signals
Typical application
In-lens Duo detector
with
filtering grid
(in-column detector)
Optional
SE,
BSE
Surface structure
Material contrast
SESI detector
, integrated
Optional
SE2,
Secondary
Ions (SI),
BSE
Channelling contrast
(crystal orientation), com-
positional contrast
aSTEM detector
Optional
Transmitted
electrons
Diffraction contrast
compositional contrast
BSD4 detector
Optional
BSE Compositional
contrast
Standard detectors
Configuration
Detected
signals
Typical application
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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