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6.6.1.2. Measuring the specimen current
The specimen current is the current flowing through the specimen. Depending on secondary and
backscattered electron emission, the specimen current is either part of or multiple of the incident
beam current. In case there is no other signal emission from the sample, the specimen current
equals the primary beam current that hits the sample. This beam current can be measured by
means of a Faraday cup. This cup consists of a strongly absorbing material with a cavity covered
by a small aperture. If the beam is focused in this cavity no secondary electrons and no backscat-
tered electrons leave the Faraday cup. The displayed current equals the incident beam current.
Procedure
1
Load the Faraday cup into the specimen chamber.
2
Pump the specimen chamber.
3
Switch on the electron beam.
4
Set a magnification that allows transmission of the complete electron beam into the cavity
through the aperture orifice.
5
Open the
Panel Configuration Bar.
6
Double-click the
Specimen Current Monitor
.
7
Select the
Stage Bias
checkbox (default).
The touch alarm is activated to avoid collision
of the stage.
8
Select the
Spot
checkbox.
The specimen current is measured continu-
ously. The measured value is displayed in the
field
Specimen I =
.
Parts required
Part no.
Faraday cup
348342-8055-000
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Page 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Page 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
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