Zeiss Crossbeam 340, Instruction Manual, Page: 11 / 134

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2. Safety
2.1. Intended use
Crossbeam 340 is a workstation that allows microscopic examination and modification of suitable
specimens.
The workstation allows you to perform the full range of FESEM and CrossBeam
®
applications,
which are:
•
SEM operation
A focused beam of electrons is scanned across the specimen to generate an image or to an-
alyse the specimen.
Suitable for the analysis of surface structures and near-surface structures of appropriate spec-
imens.
•
FIB Imaging
A focused beam of ions is scanned across the specimen to generate an image or to analyse
the specimen.
•
Milling
A focused beam of ions locally removes material from the specimen surface.
•
Gas assisted etching with ion beam (requires optional gas injection system)
With the help of a process gas, the removal of material via the focused ion beam can be ac-
celerated.
•
Gas assisted deposition with ion beam (requires optional gas injection system)
With the help of a process gas, the focused ion beam deposits material onto the specimen
surface.
•
Gas assisted etching with electron beam (requires optional gas injection system)
With the help of a process gas, the removal of material via the focused electron beam can be
accelerated.
•
Gas assisted deposition with electron beam (requires optional gas injection system)
With the help of a process gas, the electron beam deposits material onto the specimen sur-
face.
For all of these applications, the specimen has to be located in the evacuated specimen chamber.
IMPORTANT
Depending on the upgrade stage of your workstation, not all of theses features may be
available.
Commercial
use only
The microscope is to be used in a laboratory environment for commercial and scientific purpose
only.
Using the microscope for any other purpose is not allowed and could be hazardous.