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2.4.1.2. Interlock system
The interlock system includes several functions.
Chamber door interlock
The chamber door interlock is located at the inner
bottom front side of the specimen chamber.
It ensures that the door of the specimen chamber
is closed properly.
When this interlock is activated (i.e. no electrical
contact) ’
EHT Vac ready = no’
is indicated in the
SmartSEM
®
user interface. EHT and SE2 detector
voltages are blocked.
Interlock to airlock
On the right side of the rear there is an interlock to
the optional 80-mm airlock.
Vacuum interlock
The vacuum interlock is an internal interlock.
It ensures that gun vacuum and system vacuum
are better than the required thresholds.
2.4.1.3. MAIN switch
The MAIN switch is essential for compliance with
SEMI standard.
The MAIN switch
is located at the rear of the plinth.
It cuts off both phases of the mains power from the
microscope.
The MAIN switch has an emergency off function
and can be secured against resetting.
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
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