Zeiss Crossbeam 340, Instruction Manual, Page: 111 / 134

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8. Troubleshooting
8.1. Overview
The following table gives some clues to solve problems.
If you cannot solve the problem or if you are feeling unsure, do not hesitate to get in contact with
your local Carl Zeiss service engineer.
DANGER
Danger to life: Hazardous voltage inside the microscope.
Only service engineers trained and authorised by Carl Zeiss are allowed to service the mi-
croscope and to perform work on the electrical system of the microscope.
Keyword Symptom Reason Recommended action/s
FIB-SEM FIB-SEM is dead. Circuit breaker is tripped (lower
position). Check the circuit breakers.
Refer to section 8.4.1.
Vacuum „Vac ready = OK“ is not shown
after specimen exchange.
„Vac ready = OK“ is shown very
late after specimen exchange.
System vacuum is bad due to a
vacuum leak at the chamber
door.
Gas ballast at rotary pump or
scroll pump is activated.
Check the chamber door seal for
cleanliness.
If required, replace the chamber
door seal.
Deactivate gas ballast at the pre-
vacuum pump.
Vacuum Microscope does not vent. No nitrogen.
No compressed air. Check nitrogen supply.
Check compressed air supply.
System
vacuum „Vac ready = OK“ is indicated
abnormally fast. Penning gauge has not been
identified correctly. Restart the microscope:
If this does not solve the problem,
call your local Carl Zeiss service
engineer.
System
vacuum Bad system vacuum. Chamber door seal does not
seal tightly. Replace the chamber door seal.
Refer to section 8.2.2.
Gun vacuum Gun vacuum is worse than 8 to
9 x 10
-9
mbar.
Gun has been switched off for
safety reasons since gun
vacuum is too bad. Bakeout the gun head.
Refer to section 8.3.1.
Specimen
stage Stage does not move. Stage needs to be initialised. Initialise the stage. Refer to sec-
tion 8.2.1.
Specimen
stage Stored position cannot be
approached correctly. Stage needs to be driven to a
well-defined position. Initialise the stage.
Refer to section 8.2.1.
Specimen
stage/
PC Stored position cannot be
approached correctly. PC has crashed.
Stage needs to be driven to a
well-defined position. Initialise the stage.
Refer to section 8.2.1.
Drift Specimen seems to be moving. Charging effects.
Non-conducting specimen. Ensure proper conduction of the
specimen.
Optimise specimen preparation.
Apply a charge compensation
method.