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1. About this instruction manual
This instruction manual is considered to be part of the field emission scanning electron micro-
scope with focused ion beam option (FIB-SEM), hereinafter referred to as "microscope".
Read the instructions carefully. Keep the instruction manual nearby the microscope and hand it
over to future owners of the microscope.
This instruction manual is designed for users/operators who have been trained to operate the mi-
croscope by an authorised Carl Zeiss expert. Users/operators of the microscope must not deviate
from the instructions provided in this document.
Reference to
related
documents
and software
For details on options, such as Charge Compensator or 80-mm airlock, refer to the respective in-
struction manuals delivered with the microscope. You will find these manuals in the microscope
document folder.
For detailed information regarding the operating software of the microscope, refer to the Software
Manual SmartSEM
®
.
For detailed information regarding the operating software of the FIB refer to the SmartFIB online
help.
For technical data, refer to the documents Product Specification and Installation Requirements.
This instruction manual refers to the operating software SmartSEM
®
V05.07.
At a glance
This instruction manual contains the following chapters:
1. About this manual
Explains function and structure of this instruction manual
2. Safety
Summarises important safety details
3. Description
Describes structure and principle of operation of the microscope
4. Transport and storage
Gives details on transport and storage
5. Installation
Refers to Carl Zeiss service staff
6. Operation
Introduces fundamental operation procedures
7. Maintenance and repair
Describes preventive maintenance and repair tasks
8. Troubleshooting
Summarises clues to solve possible problems
9. Shutdown and disposal
Summarises notes on shutdown and disposal
10. Parts and tools
Lists consumables, spare parts, tools, and accessories
11. Abbreviations
Alphabetical list of abbreviations used in this instruction manual
12. Glossary
Alphabetical list of important technical terms
13. Declaration of conformity
Manufacturers declaration that the equipment is in conformity with all
applicable European Directives
14. Index
Alphabetical list of key words that are referred to in this instruction
manual
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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