Zeiss Crossbeam 340, Instruction Manual, Page: 95 / 134

SK=léÉê~íáçå
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
=VR=çÑ=NPQ
`êçëëÄÉ~ã=çéÉê~íáçå
3 In the FIB tab, ensure the FIB Gun Pressure
is better than 5 x 10
-7
mbar.
4 Ensure the Regulate checkbox is activated.
This guarantees a stable emission current.
The emission is automatically regulated by
changing the
FIB Suppressor Target which
can have values between 0 V and 2000 V.
5 If necessary, regenerate the ion source by heating, refer to section 8.3.2.2.
IMPORTANT
From time to time, the gallium emitter has to be regenerated by heating. The heating pro-
cedure removes the gallium oxide which has been created during operation or during
longer breaks.
6 If Aperture Status is uninitialised, click
Initialise .
The aperture initialisation may require several
seconds.
7 To switch on the ion beam, click On .
The FIB Gun is ramping up.
The gun valve is opened automatically.