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6.8. Crossbeam operation
It is assumed that the operator is already familiar with general functions of SmartSEM
®
and the
operation of the FESEM.
IMPORTANT
For general information about SmartSEM
®
refer to the Software Manual SmartSEM
®
.
For more information about crossbeam operation refer to the SmartFIB online help.
6.8.1. Preparing the workstation
Before you can make use of the CrossBeam
®
functions, you have to prepare the workstation.
6.8.1.1. Getting started
Procedure
1
Switch on the workstation.
2
Start the SmartSEM
®
user interface and log in.
3
Initialise the specimen stage.
4
Load the specimen chamber with an appropriate specimen.
5
Evacuate the specimen chamber.
6
Switch on the SEM:
a
Switch on the gun.
b
Switch on the EHT.
7
Ensure the
Specimen Current Monitor
is switched off:
a
From the menu, select
Tools/Goto Panel
.
b
Double-click
Specimen Current Monitor
.
c
Deactivate the
SCM On
checkbox.
This ensures that the touch alarm function
is active.
8
Bring the image into focus.
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Page 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Page 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Page 133: ......