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6.8.2.2. Outgassing the platinum reservoir
Outgassing is required to remove excess gas from the reservoir. If a channel is not used daily, the
gas pressure in the reservoir is built up. Therefore, outgassing is necessary to avoid that the FIB
vacuum level exceeds and decreases abruptly when the reservoir valve is opened.
Outgassing basically consists of a series of open and close cycles to let small amounts of gas out
of the reservoir.
Procedure
1
Switch off the SEM EHT.
2
Switch off the FIB EHT.
3
Open the
Panel Configuration Bar
.
4
Double-click
Gas Injection System
.
The
Gas Injection System
panel opens.
5
Ensure that the
Temperature Control
checkboxes for
Reservoir
and
Capillary
of Platinum
are activated.
6
In the
Platinum
row, click
Outgas
.
The Outgassing panel opens.
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Page 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Page 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Page 133: ......