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IMPORTANT
For more details refer to the document Product Specification Crossbeam 340.
Focused Ion Beam Column (Optional)
Ion Source
Type
: UHV, with Gallium liquid metal ion source (Ga-LMIS)
Source Life
: 3000 hours at 1 µA of emission current
Isolation
: Automatically controlled valve for source isolation
Indicators
: Status information in Software to indicate all emitter parameters
FIB resolution
3nm at 30kV
Probe Current
1 pA to 100 nA
Magnification
300x - 500.000x
Acceleration Voltage
0.5 – 30 kV
Adjustment
: Continuously variable in 10 Volt steps
Conditioning interval
Time between conditioning cycles
: 72 hours
Imaging/Patterning
Maximum field of view
580 x 580 µm
User beam shift
± 15 µm
Dwell time
Minimum dwell time
: 25 ns
Maximum dwell time
: 1 sec
Lenses
Type
: Two electrostatic lenses
Beamblanking
Built-in, electrostatic
Focus
Control
: Coarse and fine control
Stigmator
Type:
Eight pole electrostatic
Apertures
Number
: 14 mechanical aperture positions, motorised for ultra high repro-
ducibility.
No realignment required after aperture change. Continuous probe current
adjustment between aperture positions available via condenser lens.
Control
: Software control for automatic operation
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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