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3.4.3. Ion optics (FIB column)
The focused ion beam (FIB) column is the part of the workstation, where ions are emitted, accel-
erated, focused and deflected.
The FIB column is tilted by 54°.
Ion source
A liquid metal ion source of gallium (Ga
+
) serves as ion source (
1
).
Gallium ions (Ga
+
) are extracted from a liquid metal ion source. The ions are accelerated by the
acceleration voltage to an energy of maximum 30 keV. The ion emission is regulated by the ex-
tractor and stabilised by the suppressor.
Gallium is consumed during operation. Therefore, the gallium emitter cartridge is a consumable.
Moreover, the gallium emitter has to be regenerated by heating from time to time; the heating pro-
cedure removes the gallium oxide, which has been created during operation.
Condenser
The electrostatic condenser collimates and focuses the ion beam depending on the operating
mode.
1
Ion source (Ga
+
)
4
Objective lens
2
Variable apertures
5
Specimen
3
Ion beam
Fig. 3.12: Schematics of the ion optics
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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