![background image](http://html.mh-extra.com/html/zeiss/crossbeam-340/crossbeam-340_instruction-manual_927492010.webp)
NM=çÑ=NPQ
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
NK=^Äçìí=íÜáë=áåëíêìÅíáçå=ã~åì~ä
aÉÑáåáíáçå=çÑ=íÉêãë
1.3. Definition of terms
The following terms are used in this instruction manual:
FIB-SEM
Crossbeam 340 is a field emission scanning electron microscope
equipped with the focused ion beam option.
SmartSEM
®
Operating software for ZEISS field emission scanning electron micro-
scopes.
SmartFIB
®
Operating software for ZEISS FIB option.
Carl Zeiss service engineer,
Carl Zeiss service staff
Specially trained service expert, either Carl Zeiss staff or authorised
service partner of Carl Zeiss.
Operator
A trained person, who operates the microscope.
User
A person or organisation that uses products of Carl Zeiss Microscopy.
EMO box
The Emergency OFF Box (EMO-Box) is a safety device integrated in
the AC-Unit. When pushing the EMO button in an emergency situation,
the EMO-Box will interrupt the mains between main switch and the rest
of the equipment by two contactors connected in series.
The EMO box is optional, but mandatory for compliance with SEMI S2.
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Page 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Page 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Page 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Page 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Page 133: ......