2-10
IM AQ6376-01EN
CAUTION
The instrument warranty will be void if damage is caused by incorrect setting of
pressure and flow rate.
French
ATTENTION
La garantie de l'instrument est nulle si les dommages sont causés par un
paramètre incorrect de pression ou de débit.
Installation and operation
The pressure regulator and the precision flowmeter must be inserted in the system
between the purge gas manifold outlet in your facility and the AQ6376.
Moreover, gas out port of the AQ6376 must not be blocked and be sure there is
adequate ventilation in the room.
Recommended Equipments for
Purge
QTY.
Comments
Shut off valve for 1/4” tubing
1
Must be free of oil
Adjustable pressure regulator
1
To regulate up to: 75 psig (0.5 MPaG)
Flowmeter with needle valve
1
To control up to: 25 SCFH (12 L/min)
1/4” outer diameter nylon tubing
As Required
Must not be rubber
Purge gas
As Required
99.9999% pure grade nitrogen gas recommended
Precision
flowmeter
Pressure
regulator
Purge gas manifold outlet in your facility
Shut off valve
PURGE GAS IN port
PURGE GAS OUT port
Air opening
Nylon tubing
AQ6376
1.
Open the purge gas shut off valve then adjust the pressure regulator to provide an
appropriate supply pressure below the maximum rating of the precision flowmeter.
2.
Adjust the needle valve of the precision flowmeter slowly to provide an appropriate
purge gas flow rate.
The internal moisture of the AQ6376 can be displaced by the purge gas within approx. 60
minutes using a flow rate of 20 SCFH (9.5 L/min).
3.
To use the AQ6376 in a purged condition, perform alignment adjustment and
wavelength calibration with the internal air replaced with purge gas.
See section 2.1 for details on the alignment adjustment operation, and 2.2 for wavelength
calibration.
2.3 Purge