App-12
IM AQ6376-01EN
SMSR2
Of the highest mode peak level and the mode peaks on either side, whichever is higher
is defined as the side mode.
SMSR
Mode Peak(λA)
Side Mode(λ
B
)
Algorithms of analysis for the SMSR1 mode are as follows.
• Perform a mode search to obtain the mode peak.
• Of the obtained mode peaks, set the wavelength value of the mode peak at the
highest level (LOG) to
λ
A.
• Of the mode peaks on either side of
λ
A, set the wavelength value at the higher level to
λ
B. If there is no mode peak other than
λ
A,
λ
B =
λ
A shall be applicable.
• Also, set the levels (linear values) for each point of
λ
A and
λ
B to LA and LB.
• Obtain SMSR and
Δλ
from the following equations.
SMSR = LA / LB
Δλ
=
λ
B -
λ
A
SMSR3
The main mode is defined as the highest mode peak. The side modes are defined as the
highest mode peaks outside of the mask area—one on the left side and one on the right
side of the mask area.
MASK AREA
SMSR(L)
SMSR(R)
Main Mode (
λA
)
Side Mode
(
λB
)
Side Mode
(
λC
)
The analysis algorithm for the SMSR3 mode is as follows:
1. A mode search is performed to obtain the mode peaks.
2. The main mode point is set to PA. The wavelength of this point is set to λA.
3. The wavelength of the side mode that has a wavelength shorter than PA is set to λB.
The wavelength of the side mode that has a wavelength longer than PA is set to λC.
If relevant points do not exist, for the levels outside the mask area, the wavelength at
the highest level whose wavelength is shorter than PA is set to λB and the wavelength
at the highest level whose wavelength is longer than PA is set to λC.
4. The levels (linear values) of λA, λB, and λC are set to LA, LB, and LC, respectively.
5. The SMSR and Δλ are obtained from the following equations.
SMSR(L) = LA / LB
SMSR(R) = LA / LC
Δλ(L) = λB − λA
Δλ(R) = λC − λA
Appendix 3 Details of Each Analytical Functions