2-11
IM AQ6376-01EN
Preparing for Measurement
1
2
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5
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7
8
9
10
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App
Index
Note
When the AQ6376 is shipped from the factory, a resin tube is attached to the PURGE GAS IN
and PURGE GAS OUT terminals to prevent dust from entering the inside.
When installing required equipment and components, remove this resin tube.
Resin tubing
The recommended purge gas flow rate into the AQ6376 is 15 to 20 SCFH (7 to 9.5 L/
min).
The figure below shows the purge efficiency by 15 and 20 SCFH pure nitrogen gas flow
rate.
Purge efficiency of the AQ6376
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0.0
0.00
0.30
1.00
1.30
2.00
Elapsed time [hour]
2.3 Purge