Ulvac UTM1600 Series, Instruction Manual

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SECTION 6 OPERATION
48
6
6.4.2 Shutting Down Sequence in LOCAL Mode
(1) Maintained push the START/STOP button (Fig. 2-3 (1)) and check that the NORMAL lamp
(Fig. 2-3 (4)) blinks slowly (approx. 1 Hx).
(2) Wait until the NORMAL lamp (Fig. 2-3 (4)) goes out.
(3) Turn off the POWER switch.
(4) Stop the cooling water flow.
(5) If you want to isolate this product from electrical supply, unplug AC INPUT connector.
6.4.3 Shutting Down Sequence in REMOTE-control Connector
(1) Input the "STOP" signal (Refer to Table 6-4) from the remote-control connector.
If stop from "NORMAL" status, "NORMAL" signal is OFF. In addition, and check that the
"BRAKE" signal (Refer to Table 6-4) is ON in this product of a standard spec.
(2) Wait until the "ROTATION" signal (Refer to Table 6-4) turns off. At this time, the "BRAKE"
signal (Refer to Table 6-4) also turns off in this product of a standard spec.
(3) Turn off the POWER switch.
(4) Stop the cooling water flow.
(5) If you want to isolate this product from electrical supply, unplug AC INPUT connector.
6.4.4 Shutting Down Sequence in Other Communication Means
(1) Input the "STOP" command via the communication means.
The pump deceleration starts. Status is changed from "NORMAL" or "ACCELERATION"
to "BRAKE".
(2) Wait until status changes to "STOP" status.
(3) Turn off the POWER switch.
(4) Stop the cooling water flow.
(5) If you want to isolate this product from electrical supply, unplug AC INPUT connector.
When the turbo molecular pump is turned off after pumping a corrosive gas, maintain a vacuum
inside the turbo molecular pump or purge the interior of the pump with an inert gas.
Further, in such a case when a hydraulic rotary vacuum pump is used as backing vacuum
pump and there is possible reverse flow and diffusion of oil from the backing vacuum pump,
return the pump internal pressure to atmospheric pressure using dry nitrogen gas, after complete
shut-down of the pump NORMAL lamp goes out, to prevent the turbo molecular pump from being
contaminated with oil vapor.
For shutting down the turbo molecular pump in running at high speed with infeed of dry nitrogen
gas to the pump, keep the nitrogen gas flow rate at 1500 mL/min maximum.