Ulvac UTM1600 Series, Instruction Manual, Page: 48 / 108

SECTION 5 INSTALLATION
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5
5.1.3 Example of Piping Connection
5.1.3.1 Connection of Exhaust Line
Connect a backing vacuum pump or its related pipe connection flange to the outlet flange of
the pump. (Refer to Fig. 5-8)
* marks are not attached to this turbo molecular pump set.
Fig. 5-8 Example of Exhaust Line
After complete piping connection, check for perfect airtightness by helium leak test.
When use gas purge, connect the pipe for gas purge to turbo molecular pump. In detail for gas
purge, refer to Section 7 "GAS PURGE".