Ulvac UTM1600 Series, Instruction Manual

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SECTION 8 TURBO MOLECULAR PUMP RECONDITION
68
8
8.1
Recommended Maintenance Intervals
It is different for deterioration progress speed of each part changes greatly by pump condition.
(The rotor temperature rises up depending on process, therefore it’s possible the rotor life is
short.) Refer to the following list as overhaul of each process.
These are not terms of warranty.
(1) Recommended maintenance intervals for parts
These are not terms of warranty.
1) Non-active gas and Light load process
(2) Recommended maintenance intervals for other parts
1) It has the possibility that the following part is exchanged, when cleaning TMP.
2) Others
When exchanging parts, it has possibility that other parts are exchanged for improving a
reliability.
Process
Recommended
maintenance intervals
1
Non-active gas (Sputtering, Evaporation and so on)
and Light load process
3 years
2
CVD, Ion implanter and process of having deposition
pump inside
1 - 2 years
3 Etching process 6 months - 1 year
Part name
Recommended
maintenance intervals
1 Touch down bearing 3 years
2 Shaft 7 years
It has a possibility of under 2 years
(Dependent on condition)
3 Rotor
4 Motor
7 years
5 Magnetic bearing parts
Part name
55-pin Receptacle