Ulvac UTM1600 Series, Instruction Manual, Page: 8 / 108

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CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
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Operating Precautions
(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
(2) Protect the pump from any and all types of impact during operation. Impacts can also be
transmitted via the flange, so be careful of impacts near the pump as well.
(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces
electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo
molecular pumping system ((1) pump, (2) cables, etc).
(4) This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
(6) Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or
fluorine.
(7) When using the variable speed function to change the pump rotation rate, use a rotation
rate that does not cause resonance with other devices installed at the site.
(8) Be careful to prevent a rapid pressure rise or air rush during operation.
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.