Ulvac UTM1600 Series, Instruction Manual

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SECTION 4 SPECIFICATIONS
22
4
4.2
The Maximum Allowable Gas Throughput
(Note 1) Consult your ULVAC representative before using gasses except shown in above table.
(Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 3) The maximum allowable gas throughput depends on the gas type, the temperature of a
flange connecting to pump inlet flange and the gas purge flow rate.
(Note 4) With back pump whose pumping speed is 10000 L/min, and piping KF40×1.5 m length.
4.3
Environmental Conditions
Gas type
(Note 1)
Temperature of a flange
connecting to pump inlet flange
Gas purge
flow rate
The maximum
allowable gas throughput
(Note 2) (Note 3) (Note 4)
Ar
40 degrees C. 0 mL/min
850 mL/min
N
2
2200 mL/min
Installation conditions
(Refer to UL/EN 61010-1 standard)
Use : Indoor, Altitude max : 2000 m,
Over voltage category II, Pollution degree 2,
IP classification 54
Temperatures
Operation 10 to 40 degrees C.
Storage -25 to 70 degrees C.
Relative humidity 40 to 80 %RH