Ulvac UTM1600 Series, Instruction Manual

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SECTION 5 INSTALLATION
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5
5.1.2.3 Installation of UTM1200 Series
Please fix the inlet flange of the turbo molecular pump to the flange of vacuum chamber (Refer
to Fig. 5-6).
When you fix the pump, use of the bolts regulated grade, size, number and tightening torque
(Refer to Table 5-4 and Table 5-5). And use all the bolt-holes of the inlet flange of the pump. Refer
to Fig. 5-5 about usage of the bolt.
The sets of half-thread bolt and nut should be used to fix the inlet flange of the pump. Make
installation with the cylindrical part of the bolt (not thread part) fit in the mating section of flanges.
When you connect piping or valve between the chamber and the pump, please fix the same
method as the inlet flange.
Fixed only by the inlet flange of TMP
(Note 1) Rapid shutdown torque is the typical value measured by the ULVAC’s test condition. The
torque to transmit to host equipment might be different according to the rigidity of host
equipment. Host equipment should be designed to have enough margins in strength.
Fig. 5-6 Installation of UTM1200 Series
Description Rapid shutdown torque (Note 1)
UTM1200 Series 27500 N•m