Ulvac UTM1600 Series, Instruction Manual, Page: 6 / 108

iv
WARNING
Pacemaker wearers must stay away.
・
Pacemaker may malfunction when pacemaker wearers
approach the area whose magnitude of the magnetic field
is more than 5 gauss.
・
The area filled with slanted lines in the drawing on the right
shows the area where the magnitude of the magnetic field
is beyond 5 gauss. Two-dot chain line indicates the limit
line of 5 gauss.
CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere.
CAUTION
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.