Ulvac UTM1600 Series, Instruction Manual, Page: 86 / 108

SECTION 8 TURBO MOLECULAR PUMP RECONDITION
72
8
CAUTION
When pump is removed from a equipment, drain the water from water pipe during pump power
on and water valve open. If remained water leak from water pipe, pump body will be corroded.
After the water drained, shut water pipe by the cap which is attached at shipment.
CAUTION
This pump is a heavy equipment.
Lift this pump by 2 or more people or by using the lifter or the crane, during installation.
Need 2 or more eyebolts as described in Fig. 8-1 when lifting this pump on vertical position.
Need 4 eyebolts as described in Fig. 8-1 when lifting this pump on inverted position. There is a
possibility that the pump falls when using less eyebolts, than specified in Table 8-2.
A crane and eyebolts due to lifting operations should withstand the load of 5 times or more the
weight of the TMP pump, and rope should be 7 times or more. Use an eyebolt which confirms to
ISO 3266.
There is a possibility that the pump falls when installing it on other positions.
Fig. 8-1 Way to Remove the Pump
Vacuum
chamber
Vacuum
chamber
PUMP
PUMP