Ulvac UTM1600 Series Instruction Manual Download Page 16

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SECTION 1

OUTLINE AND DESCRIPTIONS

1.1

Outline

The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a

backing vacuum pump to create a high vacuum in a vacuum chamber.

Typical Applications ;

Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.

The turbo molecular pump (one standard set) consists of the following items.

・

Pump Unit with Integrated Controller

・

Power Cable

・

Standard Accessories

1 Set

Summary of Contents for UTM1600 Series

Page 1: ...ies YK17 0012 101 00 263 43467 INSTRUCTION MANUAL Turbo Molecular Pump ULVAC Inc Components Division http www ulvac co jp Before using this product be sure to read this operation manual Keep this manu...

Page 2: ...This page is intentionally left blank...

Page 3: ...ucing or copying part or all of this document without permission from ULVAC An original language of this manual is English The manuals of the same model described in other languages are the translatio...

Page 4: ...proper or cause injury by electrical shock WARNING Decisions on system compatibility should be made by the system designer or the person deciding the specifications after conducting tests as necessar...

Page 5: ...p is installed to host equipment WARNING Do not remove or do maintenance the turbo molecular pump before safety has been confirmed Improper turbo molecular pump use may be hazardous to operator s heal...

Page 6: ...may result in damaging the vacuum vessel interior and other units causing pressure fluctuation by stopping the pump and dispersal of parts CAUTION Avoid to install the pump at the following places 1...

Page 7: ...PE Protective Earth connection to the chassis of pump in final application CAUTION When pump is removed from a equipment drain the water from water pipe during pump power on and water valve open If r...

Page 8: ...mponents 6 Be sure to use the chemical type pumps to exhaust of gas which contain chlorine or fluorine 7 When using the variable speed function to change the pump rotation rate use a rotation rate tha...

Page 9: ...for 5 gauss lines 3 Remove Label Do not remove cover or else it may cause some changes inside and it is failed 4 Cable Label Be sure to use specified cable for this power supply If not it may cause co...

Page 10: ...viii Location of Label...

Page 11: ...ection 1 OUTLINE AND DESCRIPTIONS 1 1 Outline 2 1 2 Descriptions 3 1 2 1 Outside Drawing of Pump Main Unit 3 1 2 1 1 UTM1600 Series Outside Drawing 3 1 2 1 2 UTM1200 Series Outside Drawing 4 1 2 2 Pow...

Page 12: ...5 1 Installation 26 5 1 1 Pump Mounting Direction 26 5 1 2 Installation of the Pump 27 5 1 2 1 Instruction and Lifting Method 29 5 1 2 2 Installation of UTM1600 Series 30 5 1 2 3 Installation of UTM1...

Page 13: ...48 6 5 Variable Speed Operation 50 6 5 1 Outline 50 6 5 2 Operation from Start up to Low Speed Rotation 51 6 5 2 1 REMOTE Operation 51 6 5 2 2 Serial Interface Operation 51 6 5 3 Operation from Rated...

Page 14: ...on 9 TROUBLESHOOTING 9 1 Vacuum Pressure Rise 76 9 2 Abnormal Noise and or Vibration 76 9 3 Nothing Happens After an Operation is Made 77 9 4 Power Failures 78 9 4 1 Power Failure Counter operation 79...

Page 15: ...S 1 1 Outline 1 2 Descriptions 1 2 1 Outside Drawing of Pump Main Unit 1 2 1 1 UTM1600 Series Outside Drawing 1 2 1 2 UTM1200 Series Outside Drawing 1 2 2 Power Cable 1 2 3 Standard Accessories 1 2 4...

Page 16: ...ng vacuum pump to create a high vacuum in a vacuum chamber Typical Applications Semiconductor equipments Industrial equipments R D applications The other ultra high vacuum applications The turbo molec...

Page 17: ...utside Drawing Fig 1 1 UTM1600 Series Description Inlet flange A B C n d E F G UTM1600A MI AVWX VG200 374 229 263 5 8 13 300 270 299 UTM1600A MI AWWX VG250 374 229 263 5 12 13 350 320 299 UTM1600A MI...

Page 18: ...PTIONS 4 1 1 2 1 2 UTM1200 Series Outside Drawing Fig 1 2 UTM1200 Series Description Inlet flange A B C n d E F G UTM1200A MI AVWX VG150 439 294 328 5 8 11 235 210 364 UTM1200A MI AFWX ISO160F 441 5 2...

Page 19: ...00F Not included ISO250F Not included 3 Dust cap outlet flange 1 KF40 4 SERIAL CONNECTOR ASSY X05 1 Connector and contact Refer to Fig 6 8 5 REMOTE CONNECTOR X05 NWP 1 Connector for remote control non...

Page 20: ...1600 4300 series Booklet English Joint Orifice size Description 1 KF10 Clamp Centering with O ring 0 5 mm GP ADAPTOR 0 5 1303 KF 2 KF10 Dust cap 0 5 mm GP ADAPTOR 0 5 1303 KF CAP 3 UJR 6 35 Male 0 5 m...

Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 AC INPUT Panel 2 3 Local Control Panel 2 4 External I F Panel...

Page 22: ...Section 7 GAS PURGE 3 OUTLET FLANGE Outlet flange connect a backing vacuum pump or its related pipe connection KF40 4 COOLING WATER PIPELINE Cooling water pipe connector Rc1 4 5 AC INPUT PANEL AC inp...

Page 23: ...2 2 2 AC INPUT Panel Fig 2 2 Outline View of AC INPUT Panel 1 AC INPUT connecter Power cable receptacle 2 POWER switch Power switch 3 VALVE connector Water valve connector Refer to Section 5 3 Prepar...

Page 24: ...button By maintained push about 2 seconds REMOTE MODE and LOCAL MODE are changed 3 POWER lamp green This lamp lights or blinks while power on lights REMOTE mode blinks LOCAL mode 4 NORMAL lamp green...

Page 25: ...xternal I F Panel 1 REMOTE connector Connector for remote control Refer to Section 6 7 Remote control Connector 2 SERIAL connector Connector for RS 232C or RS 485 communication Refer to Section 6 8 Co...

Page 26: ...12 2 2 4 External I F Panel This page is intentionally left blank...

Page 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...

Page 28: ...ate a disk attached to the drive shaft between the axial magnetic bearings Each magnetic bearing is provided with a gap sensor 9 to detect the rotor position Fig 3 2 illustrates the outline of 5 axes...

Page 29: ...onal Drawing 1 High frequency motor 6 Radial magnetic bearing 11 Outlet flange 2 Drive shaft 7 Axial magnetic bearing 12 Protective net 3 Rotor blade 8 Touch down bearing 13 Cooling water pipeline 4 S...

Page 30: ...lar pump by controlling the following 5 degrees of freedom excluding the rotational degree Z axis of freedom Fig 3 2 Outline of 5 Axes Control X Y Z rotational axis Parallel movement X Y Y Radial disp...

Page 31: ...ply to direct current then uses a three phase inverter to control AC frequency If a power interruption occurs when the rotor is rotating at high speed the power supply unit uses the motor as a generat...

Page 32: ...18 3 3 3 Controller This page is intentionally left blank...

Page 33: ...4 4SPECIFICATIONS 4 1 Standard Specifications for Pump Unit 4 2 The Maximum Allowable Gas Throughput 4 3 Environmental Conditions 4 4 Standards Fulfilled...

Page 34: ...nting position In any desired direction Note 4 Vibration level by ULVAC s method 0 01 m or less 0 peak Noise 57 dB A or less 37200 rpm Recommended flow rate of purge gas 30 mL min Note 5 Admissible pu...

Page 35: ...rning Failure of magnetic bearing Dew condensation Refer to Section 5 3 Protection Alarm Alarm lamp illuminates Power Interruption Alarm Decelerated while maintaining levitation using regenerative pow...

Page 36: ...flow rate Note 4 With back pump whose pumping speed is 10000 L min and piping KF40 1 5 m length 4 3 Environmental Conditions Gas type Note 1 Temperature of a flange connecting to pump inlet flange Ga...

Page 37: ...4 4 Standards Fulfilled 23 4 4 4 Standards Fulfilled Safety EN 61010 1 UL 61010 1 EN 1012 2 EMC EN 61326 1 Class A EN 61000 3 2 Class A EN 61000 6 2...

Page 38: ...24 4 4 4 Standards Fulfilled This page is intentionally left blank...

Page 39: ...ting Method 5 1 2 2 Installation of UTM1600 Series 5 1 2 3 Installation of UTM1200 Series 5 1 3 Example of Piping Connection 5 1 3 1 Connection of Exhaust Line 5 1 3 2 Connection of Cooling Water Line...

Page 40: ...zontal inverted or oblique position The outlet port of the turbo molecular pump should face horizontally or vertically when installing the pump horizontally and obliquely When an installation directio...

Page 41: ...in strength in preparation for an emergency accident WARNING Ensure that no oil mist or hazardous substances are present in process line as safe ducting procedure when turbo molecular pump is installe...

Page 42: ...r the pump inlet or outlet without fail CAUTION The center of gravity of the pump is indicated in Fig 5 3 Be sure that the pump does not move or fall down during installation or storage CAUTION This p...

Page 43: ...pump is shown in Fig 5 3 Fix securely to avoid moving or falling down in the event of an earthquake Fig 5 3 Center of Gravity of the Pump Position Inlet flange Eyebolt size Number of eyebolts Remark...

Page 44: ...he inlet flange of the pump Make installation with the cylindrical part of the bolt not thread part fit in the mating section of flanges When you connect piping or valve between the chamber and the pu...

Page 45: ...uantity M12 12 PC M10 12 PC Material Stainless steel Grade A2 70 JIS B 1054 ISO 3506 Washer Plain washer and spring lock washer Bolt Nut Half thread All thread Tap Fixing method Only by the inlet flan...

Page 46: ...he inlet flange of the pump Make installation with the cylindrical part of the bolt not thread part fit in the mating section of flanges When you connect piping or valve between the chamber and the pu...

Page 47: ...he Fixing Bolt Bolt Nut Half thread All thread Tap Fixing method Only by the inlet flange Inlet flange VG150 ISO160F Bolt size Quantity M10 8 PC Material Alloyed steel standardized in AMS6419 Grade Te...

Page 48: ...n flange to the outlet flange of the pump Refer to Fig 5 8 marks are not attached to this turbo molecular pump set Fig 5 8 Example of Exhaust Line After complete piping connection check for perfect ai...

Page 49: ...own in Fig 5 9 The valve to isolate Lockout Tagout cooling water should be installed at user equipment Fig 5 9 Connector of Cooling Water Line 2 When connecting the cooling water pipes screw the pipe...

Page 50: ...reached and it should be marked as the disconnecting device for the equipment Check that the part number stuck on the cable is same as the part number shown in Section 1 2 2 Power Cable If using conne...

Page 51: ...7 5 REFERENCE For the specified power voltage refer to the side panel of the power supply unit Fig 5 12 Power Cable Table 5 6 Power Cable CONNECTION Wire color of power cable Green Yellow Black White...

Page 52: ...condition shown in Fig 5 13 Ex When the ambient temperature is 30 degrees C and the relative humidity is 70 the cooling water temperature should be 24 degrees C or more Note 2 Please do not install a...

Page 53: ...he turbo molecular pump and the vacuum chamber close this valve too 4 Provide a flowmeter on the downstream of cooling water line otherwise the turbo molecular pump will shut down and otherwise set up...

Page 54: ...40 5 5 5 Notes on Transportation This page is intentionally left blank...

Page 55: ...ting Down 6 4 1 Preparations Prior to Shutting Down Operation 6 4 2 Shutting Down Sequence in LOCAL Mode 6 4 3 Shutting Down Sequence in REMOTE control Connector 6 4 4 Shutting Down Sequence in Other...

Page 56: ...ump cannot be started stopped using two or more of these ways at the same time Determination of which start stop instruction to be followed depends on the operation mode selected There are five operat...

Page 57: ...nector serial connector RS 232C RS 485 When using serial communication the pump can be started or stopped by sending an online request command via the corresponding communication specification To retu...

Page 58: ...sh the RESET button Fig 2 3 2 to change from REMOTE mode to LOCAL mode The POWER lamp blinks when becoming a LOCAL mode 3 Evacuate the turbo molecular pump by using a backing vacuum pump 4 Start up pr...

Page 59: ...lamp Under this condition the rotor of the turbo molecular pump is levitated by the magnetic bearing 3 Online command is demanded from the communication means and confirm the mode was switched to the...

Page 60: ...p starts to accelerate and after a few seconds the ROTATION signal turns on In this product of a standard spec ACCELERATION signal Refer to Table 6 4 from the remote control connector turns on when th...

Page 61: ...mp does not exceed 20 kPa GAUGE CAUTION Electrical energy isolation Lockout Tagout should be achieved by opening the main disconnect device or circuit breaker of host equipment thereby removing power...

Page 62: ...y unplug AC INPUT connector 6 4 4 Shutting Down Sequence in Other Communication Means 1 Input the STOP command via the communication means The pump deceleration starts Status is changed from NORMAL or...

Page 63: ...NORMAL lamp goes out ROTATION signal Refer to Table 6 4 turns off or change to stop status when the pump rotational speed is 60 rpm or less Turning off the POWER switch permits the pump rotor to be s...

Page 64: ...6 4 3 The NORMAL mode or LOW SPEED mode selection can be made before or after start up 4 Set the low speed value between 25 and 100 of the rated speed in 0 1 increments using the serial communications...

Page 65: ...arts to accelerate 6 When the rotational speed reaches 80 of low speed value the NORMAL signal turns on In this product of a standard spec the remote control connector ACCELERATION signal turns off 7...

Page 66: ...p The BRAKE signal ON Refer to Table 6 4 in this product of a standard spec 4 Once rotation reaches the low speed rotation speed the NORMAL signal ON In this product of a standard spec the BRAKE signa...

Page 67: ...this product of a standard spec 4 If the set low speed value exceed 80 rated speed remote control signals remain unchanged and the pump accelerates 5 When the rated speed is reached the pump stops ac...

Page 68: ...ALARM reset Reset operation when alarm occur Timer Run time Timer and Counter Monitoring and reset Maintenance timer Power failure touch down count High speed touch down count MB warning count Setting...

Page 69: ...run status STATUS Descripition NORMAL ACCELERATION BRAKE STOP E STOP E BRAKE E IDLE Rotating at rated rotation speed Accelerating Decelerating Stopped Alarm is active stopped Alarm is active decelera...

Page 70: ...nector Fig 6 3 Remote control Circuit Connection method By momentary type START STOP switch By alternate type switch Wiring connection Control Pump start by short circuiting 1 and 16 Pump stop by open...

Page 71: ...Note 3 Contact Input STOP 2 Pump stop by opening GND and pin No 2 Note 3 Note 5 RESET Note 4 14 Resetting operation on short circuiting between GND and pin No 14 LOW SPEED 15 Variable speed operation...

Page 72: ...e 1 Alarm occurred Open Close Power OFF and no alarm Close Open SEMI E74 Note 2 Power OFF and active alarm Close Open No alarm Open Close WARNING 13 25 12 25 EI 03 Note 1 Warning occurred Open Close P...

Page 73: ...used For connection with this connector the communication cable with shield is necessary The shield of the cable should be connected to case Interface RS 232C Synchronous system Asynchronous Transmis...

Page 74: ...6 OPERATION 60 6 3 Cable length Connection cables can be extended up to 15 meters but may be subjects to errors depending on actual operational environment Fig 6 5 Example of RS 232C Cable Wiring Conn...

Page 75: ...i drop function OFF Interface RS 485 2 wire Synchronous system Asynchronous Transmission rate 9600 bps fixed Character configuration Start bit 1 Data bits 8 Parity None Stop bit 1 Flow control None Nu...

Page 76: ...rminator A terminator 120 1 4 W min is required for connection Terminators are not necessary for multidropped turbo molecular pump with another pump or pump to which the computer connects is connected...

Page 77: ...nector Fig 6 8 Serial Connector and Pin Configuration NOTICE Serial communication specifications conform to RS 232C and RS 485 These interfaces were tested on a typical condition but the normal commun...

Page 78: ...64 6 6 8 Communication Specifications This page is intentionally left blank...

Page 79: ...7 7GAS PURGE...

Page 80: ...urging Method adaptor with 0 5 mm orifice Table 7 1 Table of Gas Purge Adaptor Start Gas Supply After starting backing vacuum pump but before exhausting process gas Stop Gas Supply After thoroughly ex...

Page 81: ...ITION 8 1 Recommended Maintenance Intervals 8 2 Turbo Molecular Pump Decontamination 8 3 Touch down Bearing Replacement 8 4 Check of the Rotor Blades 8 5 Power Supply Unit Parts Replacement 8 6 Turbo...

Page 82: ...mmended maintenance intervals for other parts 1 It has the possibility that the following part is exchanged when cleaning TMP 2 Others When exchanging parts it has possibility that other parts are exc...

Page 83: ...r rotational resistance and require replacement of touch down bearings The replacement of the touch down bearing is done only by ULVAC or an approved service company 8 4 Check of the Rotor Blades Roto...

Page 84: ...Doing so may prevent obtaining the maximum performance To obtain ensure the pump and power supply unit operate safely and perform as designed have parts that exceed their expected service life be rep...

Page 85: ...e performed by ULVAC or an approved service company A copy of this from is printed at the end of this manuals Repair of the turbo molecular pump The following precautions are required before forwardin...

Page 86: ...installation Need 2 or more eyebolts as described in Fig 8 1 when lifting this pump on vertical position Need 4 eyebolts as described in Fig 8 1 when lifting this pump on inverted position There is a...

Page 87: ...ure and humidity environment etc from the outside Please use the packing materials which were used at shipment from ULVAC or use the packing materials having a same quality or better Position Inlet fl...

Page 88: ...74 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...

Page 89: ...ration 9 3 Nothing Happens After an Operation is Made 9 4 Power Failures 9 4 1 Power Failure Counter operation 9 5 Alarm Detection Capabilities 9 5 1 Movement in Alarm Detection Capabilities ALARM 9 5...

Page 90: ...or vibration the turbo molecular pump operation is to be stopped immediately But there is possible that a race of touch down bearing Fig 3 1 8 may make sounds for seconds when the pump internal pressu...

Page 91: ...L mode POWER lamp blinks 6 2 Other causes Check the Alarm lamp is not lights in orange If an alarm is indicated correct the malfunction and reset alarm 9 5 3 Remote STOP signal active but the turbo mo...

Page 92: ...ing Table 9 2 shows the number of revolutions and period of time that will elapse before being supported by the touch down bearing when the power fails at the rated speed Table 9 2 Time and Rotational...

Page 93: ...ator lamp NORMAL Before power failure indication goes on Before power failure indication goes on Before power failure indication goes on Before power failure indication goes on Alarm Before power fail...

Page 94: ...pump start the protective operations shown in Table 9 6 Table of Alarms 4 The detection error is recorded in the error log 9 5 2 Movement in Alarm Detection Capabilities WARNING 1 Alarm lamp Fig 2 3 5...

Page 95: ...k that too much purge gas is not flowing Check that process gas flow rate is not too high 4 1 4 19 EI FAILURE Power supply unit can not identify the pump correctly Consult your ULVAC representative 5...

Page 96: ...d inlet pressures are not too high Check for leakage Check that too much purge gas is not flowing 6 2 14 49 TMP CAN NOT START Pump does not rotate Adhesion of reaction products or damage to the protec...

Page 97: ...ent strong external shock or vibrations Continuous operation is possible However if the shock or vibrations occur frequently stop the pump and remove the source of the shock or vibrations or re examin...

Page 98: ...e control system 32 EI DC DC OVERTEMP Increased temperature inside control system Free run motor stop 34 EI INV OVERCURR Overcurrent ran through the motor 35 EI INV OVERVOLT Defective circuit 36 EI DC...

Page 99: ...ON1 Y2 60 MB VIBRATION1 Z 61 MB SENSOR ERR X1 Abnormal output signal from the magnetic bearing sensor 62 MB SENSOR ERR Y1 63 MB SENSOR ERR X2 64 MB SENSOR ERR Y2 65 MB SENSOR ERR Z 66 MB DSP ERROR Err...

Page 100: ...s possible detected during power supply self diagnostics 82 MB SELFCHECK Y1 83 MB SELFCHECK X2 84 MB SELFCHECK Y2 85 MB SELFCHECK Z 86 MB VIB WARN X1 Vibrations of the magnetic bearing become temporar...

Page 101: ...10 10WARRANTY CLAUSES...

Page 102: ...service conditions described in this document such as temperature range and power etc b Direct export transaction Product which has damage caused by a failure on delivery In the case of direct export...

Page 103: ...he reason of failure was improper use which does not conform to the use condition of this Product j Consumable parts k The SECURITY seal certificates that the product was made or maintenanced by ULVAC...

Page 104: ...90 10 This page is intentionally left blank...

Page 105: ...er 8 35 E External I F panel 8 I inlet flange 8 15 L Local control panel 8 N noise 20 NORMAL lamp 10 O outlet flange 8 15 P POWER lamp 10 POWER switch 9 Protective 15 R REMOTE connector 11 RESET butto...

Page 106: ...Index Index 2 This page is intentionally left blank...

Page 107: ...ontaminated with reactive products or substances produced by reaction Product model Model Serial No Application Remarks Contaminant Check an applicable box I guarantee that above returned item s is no...

Page 108: ...c http www ulvac co jp en Service Centers http www ulvac co jp en support service center Sales O ces http www ulvac co jp en support sales o ces TEL 0467 89 2261 TEL 03 5769 5511 TEL 06 6397 2286 ULVA...

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