6.5
Variable Speed Operation
53
6
6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation
This is the procedure to select normal speed operation during low speed rotation.
6.5.4.1 REMOTE Operation
(1) Cancel the "LOW SPEED" signal (Refer to Table 6-4) inputted in the remote-control
connector.
(2) Pump starts to accelerate. If the set low speed value did not exceed 80 % rated speed, the
"NORMAL" signal turns off. At this time, "ACCELERATION" signal turns on in this product
of a standard spec.
(3) When the rotational speed reaches 80 % rated speed, the "NORMAL" signal turns on
(Refer to Table 6-4).
At this time, "ACCELERATION" signal turns off in this product of a standard spec.
(4) If the set low speed value exceed 80 % rated speed, remote-control signals remain
unchanged and the pump accelerates.
(5) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.
6.5.4.2 Serial Interface Operation
(1) "NORMAL SPEED" command is input via the serial communication.
(2) Pump starts to accelerate. If the set low speed value did not exceed 80 % rated speed,
status is changed from "NORMAL" to "ACCELERATION".
(3) When the rotational speed reaches 80 % rated value, status is changed from
"ACCELERATION" to "NORMAL".
(4) If the set low speed value exceed 80 % rated speed, status remain unchanged and the
pump accelerates.
(5) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.
(Note) If low speed value is set to 100 %, the same operation occurs.
Summary of Contents for UTM1600 Series
Page 2: ...This page is intentionally left blank...
Page 10: ...viii Location of Label...
Page 26: ...12 2 2 4 External I F Panel This page is intentionally left blank...
Page 32: ...18 3 3 3 Controller This page is intentionally left blank...
Page 38: ...24 4 4 4 Standards Fulfilled This page is intentionally left blank...
Page 54: ...40 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 78: ...64 6 6 8 Communication Specifications This page is intentionally left blank...
Page 79: ...7 7GAS PURGE...
Page 88: ...74 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 101: ...10 10WARRANTY CLAUSES...
Page 104: ...90 10 This page is intentionally left blank...
Page 106: ...Index Index 2 This page is intentionally left blank...