Ulvac UTM1600 Series, Instruction Manual

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SECTION 1 OUTLINE AND DESCRIPTIONS
6
1
1.2.4 Option
Please select if necessary.
Instruction Manual
Gas Purge Adaptor
1.2.5 Document List
Document lists that relates to this product are as follows.
Description Notes
1 Instruction manual for UTM1200/1600 series Booklet English
2
Instruction manual for Serial communication (for UTM1200/1600/
4300 series) Booklet
English
Joint Orifice size Description
1 KF10 (Clamp / Centering with O-ring) Φ0.5 mm GP ADAPTOR, 0.5 1303 KF
2 KF10 (Dust cap) Φ0.5 mm GP ADAPTOR 0.5 1303, KF CAP
3 UJR 6.35 (Male) Φ0.5 mm ADAPTOR, 0.5 UJR
4 SWAGELOK Φ6.35 Φ0.5 mm ADAPTOR, 0.5 SWG
5 4-VCR (Female) Φ0.5 mm ADAPTOR, 0.5 VCR
Component
1
Instruction manual for UTM1200/1600 series (This manual)
(Including in instruction manual CD-ROM.)
2 Instruction manual for Serial communication (for UTM1200/1600/4300 series)
3 Important safety instructions for UTM1200/1600 series