Ulvac UTM1600 Series, Instruction Manual

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SECTION 2 IDENTIFICATION AND FUNCTION
8
2
2.1
Pump Main Unit
Fig. 2-1 Pump Main Unit
(1) INLET FLANGE .................................... Inlet flange, joint the turbo molecular pump,
VG200, VG250, ISO200F, ISO250F, VG150 and
ISO160F are available.
(2) PORT FOR GAS PURGE.....................Gas purge adaptor port, KF10, UJR 6.35,
Swagelok Φ6.35 and 4-VCR are available.
(Refer to Section 7 "GAS PURGE".)
(3) OUTLET FLANGE ................................Outlet flange, connect a backing vacuum pump or its
related pipe connection, KF40.
(4) COOLING WATER PIPELINE.............. Cooling water pipe connector, Rc1/4.
(5) AC INPUT PANEL ................................AC input connector, power switch and VALVE
connector.
(Refer to Section 2.2 "AC INPUT Panel".)
(6) LOCAL CONTROL PANEL...................Local control switch and status LEDs.
(Refer to Section 2.3 "Local Control Panel".)
(7) External I/F PANEL ..............................Communication interface.
(Refer to Section 2.4 "External I/F Panel".)
(8) VALVE .................................................. Cooling water valve (24 VDC drive)