Ulvac UTM1600 Series, Instruction Manual, Page: 59 / 108

6.2 Startup Preparation
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6.2.3 Start-up Preparation Sequence in Other Communication Means
(1) Feed the cooling water into the cooling line.
(2) Turn on the POWER switch and check that the POWER lamp. Under this condition, the
rotor of the turbo molecular pump is levitated by the magnetic bearing.
(3) Online command is demanded from the communication means and confirm the mode was
switched to the communication means mode.
(4) Evacuate the turbo molecular pump by using a backing vacuum pump.
(5) Start-up preparation is complete if the pressure in the turbo molecular pump reduces below
200 Pa.