Ulvac UTM1600 Series, Instruction Manual

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SECTION 6 OPERATION
58
6
Table 6-5 Remote-control Signals Setting Mode
(Note 1) When set to EI-03, behavior of remote-control signals is the same as ULVAC Turbo Molecular
Pump power supply "EI-xx03M" and "EI-R04" series.
(Note 2) When set to SEMI E74, behavior of remote-control signals conform to SEMI E74 standard
"Specification for Vacuum Pumps - Turbomolecular Pumps".
Refer to the same standard about the shape of connectors and the pin configuration.
6.7.3 Connector
Fig. 6-4 Arrangement of Remote-control Connector Pin (front view)
Signal Description Pin No.
ALARM (23)-(24) (11)-(24)
EI-03
(Note 1) Alarm occurred Open Close
Power OFF and no alarm Close Open
SEMI E74
(Note 2) Power OFF and active alarm Close Open
No alarm Open Close
WARNING (13)-(25) (12)-(25)
EI-03
(Note 1) Warning occurred Open Close
Power OFF and no alarm Close Open
SEMI E74
(Note 2) Power OFF and active warning Close Open
No alarm Open Close
REMOTE EI-03
(Note 1) Even if remote control is possible, "REMOTE" signal is OFF during
power interruption regenerative control.
SEMI E74
(Note 2) "REMOTE" signal is normally ON when remote control is enabled.
STOP REMOTE
ONLY "STOP" signal (open between (2) and (16)) is enabled only when
remote control is enabled.
REMOTE &
RS-XXX "STOP" signal (open between (2) and (16)) is enabled by priority even
during RS-232C and RS-485 operation. Use this setting such as when
using hardware interlock.