Ulvac UTM1600 Series, Instruction Manual

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SECTION 7 GAS PURGE
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7
This turbo molecular pump incorporates a gas purge port (Fig. 2-1 (2)).
In case of using a gas purge, the joint can be selected from Table 7-1.
The proper purge gas flow rate is 30 mL/min.
Fig. 7-1 is an example of gas purge piping diagram. Use a filter of 5 μm or less in element size.
Use flow control valve to control the flow rate.
Fig.7-1 Gas Purging Method (adaptor with Φ0.5 mm orifice)
Table 7-1 Table of Gas Purge Adaptor
Start Gas Supply After starting backing vacuum pump, but before exhausting process gas
Stop Gas Supply
After thoroughly exhausting process gas, but before shutting off backing
vacuum pump
Gas Type Nitrogen, purity 4N (99.99 %) or better
Joint Orifice size Description
KF10 (Clamp / Centering with O-ring) Φ0.5 mm GP ADAPTOR, 0.5 1303 KF
KF10 (Dust cap) Φ0.5 mm GP ADAPTOR 0.5 1303, KF CAP
UJR 6.35 (Male) Φ0.5 mm ADAPTOR, 0.5 UJR
SWAGELOK Φ6.35 Φ0.5 mm ADAPTOR, 0.5 SWG
4-VCR (Female) Φ0.5 mm ADAPTOR, 0.5 VCR