Ulvac UTM1600 Series, Instruction Manual

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CAUTION
The standard power input voltage is 200 to 240 VAC ± 10 %. Connection of the control system
to the incorrect input voltage can cause damage to the equipment. Supply the power via a circuit
breaker (rating 15 A). Please provide PE (Protective Earth) connection to the terminal of a "PE"
marked wire in final application. Please provide PE (Protective Earth) connection to the chassis of
pump in final application.
CAUTION
When pump is removed from a equipment, drain the water from water pipe during pump power
on and water valve open. If remained water leak from water pipe, pump body will be corroded.
After the water drained, shut water pipe by the cap which is attached at shipment.
CAUTION
This turbo molecular pump has the integrated power supply.
Do not separate the power supply from the pump, or the pump cannot be operated even if the
power supply is connected again.