Ulvac UTM1600 Series, Instruction Manual

Page: 35 / 108

4.1 Standard Specifications for Pump Unit
21
4
(Note 1) Do not use corrosive gasses because there is a possibility that the rotor blade is damaged
by corrosion.
(Note 2) Maximum allowable gas throughput, Maximum allowable inlet pressure and Maximum
allowable outlet pressure cannot be satisfied at same time.
(Note 3) Without a protective net.
Pumping speed for N
2
is 1350 L/s (VG200 / ISO200F), 1450 L/s (VG250 / ISO250F),
1020 L/s (VG150), 900 L/s (ISO160F) with a protective net.
(Note 4) The outlet port of the turbo molecular pump should face horizontally or vertically when
installing the pump horizontally and obliquely. (Refer to Section 5.1.1 "Pump Mounting
Direction" for detail.)
(Note 5) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 6) The time can be changed to 1 second from 2 seconds.
Alarm detection
Alarm
Pump temperature, Pump startup error, Overload and
Overspin for motor, Failure of magnetic bearing,
Power supply malfunction (Overtemperature inside control
system or failure of drive circuit), Power interruption etc.
Warning
Failure of magnetic bearing,
Dew condensation (Refer to Section 5.3)
Protection
Alarm
Alarm lamp illuminates.
Power Interruption Alarm :
Decelerated while maintaining levitation using regenerative
power. After decelerating to specified low speed, levitation is
stopped and rotor is supported by touch-down bearing.
When power is restored, the pump can be restarted by
resetting.
Dew Alarm :
Decelerates while maintaining magnetic levitation.
When other alarms occur :
Stops operation or decelerates. Magnetic levitation is
continued.
Warning
ALARM lamp flashes.
Dew warning : Cooling water bypasses and pump operation
continues.
When other warning occur : Pump operation continues.
Admissible ambient
magnetic field Radial direction
Axial direction 3 mT
15 mT
Water
Flow rate
Pressure
Temperature 3 to 4 L/min or more
0.2 to 0.4 MPa
19 to 30 degrees C. (above dew point)
Water quality
Non-corrosive industrial water
Solid particle size (Max) : 0.025 mm
2
PH (@25 degrees C.) : 6.5-8.2
Electrical conductivity (@25 degrees C.) : 100-800 μS/cm
(Electrical resistivity : 1250-10000 Ωcm)
Input electric power
Voltage Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz)
Maximum power 0.75 kVA
Insulation
withstand voltage
1500 V, 1 minute
Short circuit
current ratings
(SCCR)
100 A