Ulvac UTM1600 Series, Instruction Manual

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SECTION 5 INSTALLATION
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5
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.
CAUTION
The center of gravity of the pump is indicated in Fig. 5-3. Be sure that the pump does not move
or fall down during installation or storage.
CAUTION
This pump is a heavy equipment.
Lift this pump by 2 or more people or by using the lifter or the crane, during installation.
Need 2 or more eyebolts as described in Fig. 5-2 when lifting this pump on vertical position.
Need 4 eyebolts as described in Fig. 5-2 when lifting this pump on inverted position. There is a
possibility that the pump falls when using less eyebolts, than specified in Table 5-1.
A crane and eyebolts due to lifting operations should withstand the load of 5 times or more the
weight of the TMP pump, and rope should be 7 times or more. Use an eyebolt which confirms to
ISO 3266.
There is a possibility that the pump falls when installing it on other positions.